| # | Journal | Articles | Citations | R ARank | R CRank |
|---|
| 1 | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 71 | 3,860 | 1 | 2 |
| 2 | Applied Physics Letters | 39 | 1,345 | 331 | 998 |
| 3 | Journal of Applied Physics | 27 | 1,038 | 377 | 468 |
| 4 | Journal Physics D: Applied Physics | 16 | 966 | 106 | 109 |
| 5 | Journal of the Electrochemical Society | 20 | 853 | 208 | 333 |
| 6 | Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena | 13 | 424 | 20 | 29 |
| 7 | Journal of Vacuum Science & Technology B | 14 | 398 | 2 | 8 |
| 8 | Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics | 16 | 330 | 12 | 12 |
| 9 | Plasma Processes and Polymers | 13 | 232 | 49 | 142 |
| 10 | ECS Journal of Solid State Science and Technology | 1 | 202 | 1.2K | 54 |
| 11 | Materials Science and Engineering B: Solid-State Materials for Advanced Technology | 4 | 163 | 259 | 211 |
| 12 | Physical Review B | 2 | 128 | 23.7K | 16.7K |
| 13 | Plasma Sources Science and Technology | 2 | 126 | 761 | 372 |
| 14 | Physica Status Solidi A | 3 | 108 | 376 | 154 |
| 15 | Surface Science | 2 | 87 | 2.3K | 1.7K |
| 16 | IBM Journal of Research and Development | 2 | 79 | 15 | 63 |
| 17 | Materials Science and Engineering Reports | 1 | 76 | 70 | 596 |
| 18 | Physics Today | 1 | 68 | 134 | 269 |
| 19 | Thin Solid Films | 3 | 51 | 2.4K | 4.5K |
| 20 | Physical Review Letters | 2 | 47 | 23.5K | 43.7K |
| 21 | Materials Research Society Symposia Proceedings | 5 | 40 | 1.5K | 468 |
| 21 | Surface and Interface Analysis | 2 | 40 | 683 | 811 |
| 23 | Plasma Chemistry and Plasma Processing | 1 | 37 | 478 | 460 |
| 24 | Journal of Chemical Physics | 1 | 35 | 17.9K | 17.4K |
| 25 | Physics Letters, Section A: General, Atomic and Solid State Physics | 2 | 33 | 2.5K | 3.8K |
| 26 | Biointerphases | 1 | 25 | 392 | 645 |
| 27 | Applied Surface Science | 2 | 21 | 8.9K | 26.8K |
| 28 | Langmuir | 1 | 18 | 16.9K | 29.8K |
| 28 | Microelectronic Engineering | 1 | 18 | 2.2K | 2.8K |
| 30 | Radiation Effects and Defects in Solids | 2 | 13 | 378 | 521 |
| 31 | European Physical Journal D | 1 | 12 | 1.8K | 2.5K |
| 31 | Solid-State Electronics | 1 | 12 | 1.4K | 2.2K |
| 33 | Advanced Materials | 1 | 10 | 19.4K | 39.6K |
| 34 | Japanese Journal of Applied Physics | 1 | 9 | 6.2K | 7.8K |
| 35 | Macromolecular Chemistry and Physics | 1 | 8 | 2.3K | 5.5K |
| 36 | Physica B: Physics of Condensed Matter & C: Atomic, Molecular and Plasma Physics, Optics | 2 | 6 | 30 | 156 |
| 37 | Nuclear Instruments & Methods in Physics Research B | 1 | 5 | 4.0K | 7.0K |
| 38 | Nuclear Fusion | 1 | 4 | 2.4K | 3.5K |
| 39 | Nanotechnology | 1 | 3 | 9.8K | 27.4K |
| 40 | Journal of Micro/ Nanolithography, MEMS, and MOEMS | 1 | 1 | 151 | 682 |
