Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

1.3(top 50%)

impact factor

4.0K(top 5%)

papers

33.3K(top 10%)

citations

48(top 20%)

h-index

1.4(top 50%)

extended IF

4.0K

all documents

34.2K

doc citations

78(top 10%)

g-index

Top Authors (by article citations)

#	Author	Articles	Citations	R ARank	R CRank
1	Boon S Ooi	2	55	2	6
1	Tien Khee Ng	2	55	3	5
1	Osman M Bakr	1	49	8	12
1	Ibrahim Dursun	1	49	2	4
1	Mohd S Alias	2	55	1	2
1	Dong Shi	1	49	1	4
1	Davide Priante	1	49	1	1
9	Stephen J Pearton	10	111	1	1
9	Alexander Y Polyakov	1	48	2	2
9	Uthirakumar Periyayya	1	48	3	3
9	Nikolai B Smirnov	1	48	1	1
9	In-hwan Lee	1	48	2	4
14	Zhengguo Xiao	1	43	4	9
14	Chenggong Wang	1	43	3	4
14	Yong-li Gao	1	43	6	8
14	Jinsong Huang	1	43	7	16
14	Congcong Wang	1	43	2	4
14	Cheng Bi	1	43	3	8
21	Heiko Wolf	1	40	1	2
21	Armin Knoll	1	40	1	2
21	Urs Duerig	1	40	1	2
21	Daniel J Coady	1	40	1	4
25	Sven Rodt	1	39	2	3
25	André Strittmatter	1	39	4	4
25	Stephan Reitzenstein	1	39	5	4
25	Jan-Hindrik Schulze	1	39	1	1
25	Manuel Gschrey	1	39	1	1
30	Xiaogan Liang	1	37	3	4
30	Chang-Yong Nam	1	37	1	4
30	Katsuo Kurabayashi	1	37	3	7
30	Da Li	1	37	1	1
30	Aaron Stein	1	37	2	4
30	Sungjin Wi	1	37	2	4
30	Kim Kisslinger	2	40	1	2
30	Bo-Ram Oh	1	37	1	3
30	Mikai Chen	1	37	2	4
39	Vibhor Kumar	1	34	1	1
39	Shuvam Pawar	1	34	1	1
39	Jamil Akhtar	1	34	1	1
42	Urban Forsberg	1	32	1	3
42	Erik Janzen	1	32	7	6
42	Örjan Danielsson	1	32	1	2
42	Henrik Pedersen	1	32	2	3
42	Xun Li	1	32	1	2
47	Jennifer K Hite	2	37	2	3
47	Michael A Mastro	2	37	1	1
47	James H Edgar	1	29	1	2
47	Harry M Meyer	1	29	1	7
51	Seongjae Cho	1	28	1	2
51	Byung-Gook Park	1	28	3	3
51	Sungjun Kim	1	28	1	2
51	Thomas Mikolajick	2	31	3	13
55	Jun Lou	1	26	5	14
55	Jason D Fowlkes	1	26	3	4
55	An-Ping Li	1	26	1	2
55	Corentin Durand	1	26	1	2
59	Åsa Haglund	1	25	1	1
59	Shu-Yi Li	1	25	1	2
59	Gunnar A Niklasson	1	25	3	6
59	Mark D Losego	1	25	1	4
59	Brandon D Piercy	1	25	1	1
59	José Montero Amenedo	1	25	1	1
59	Ehsan Hashemi	1	25	1	1
66	Midori Kawamura	1	23	1	1
67	Jian Zhou	1	22	10	27
67	Jian Zhou	1	22	6	18
67	Jian Zhou	1	22	1	1
67	L James Lee	1	22	1	7
67	Allen Y Yi	1	22	1	2
67	Peng He	1	22	1	2
73	Natalie O V Plank	1	20	1	2
74	Fan Ren	3	32	1	2
74	Philip X-L Feng	1	19	3	5
74	Arnob Islam	1	19	1	1
74	Jin-Seong Park	1	19	5	8
74	Seong Jun Kang	1	19	1	3
74	Zenghui Wang	1	19	1	4
74	Rui Yang	1	19	1	1
74	Xu-Qian Zheng	1	19	1	3
82	Igor Paprotny	1	18	1	1
82	Alex J Bastiaens	1	18	1	1
82	Jaap M J Den Toonder	1	18	1	2
82	Ralu Divan	1	18	1	1
82	Lara A Gundel	1	18	1	1
82	Regina Luttge	1	18	2	4
82	Sijia Xie	1	18	1	1
82	Liliana Stan	1	18	1	1
82	Jean-Philippe Frimat	1	18	1	1
91	Xavier Chevalier	1	17	1	1
91	Raluca Tiron	1	17	2	2
91	Felice Crupi	1	17	2	4
91	Mindaugas Lukosius	1	17	1	2
91	Isabelle Servin	1	17	1	1
91	Dattatray J Late	1	17	6	14
91	Ch Wenger	2	27	1	4
91	Christophe Navarro	1	17	2	3
99	Mohammad Ali Mohammad	1	16	2	7
99	Richard P Leavitt	1	16	1	1
99	Chris Richardson	1	16	1	1
99	Yi Yang	1	16	4	10
99	Noboru Ohtani	1	16	1	2
104	Zheng Jun Zhang	1	15	5	10
104	Gilles Patriarche	1	15	7	12
104	Shasha Lv	1	15	1	4
104	Abdallah Ougazzaden	1	15	5	6
104	Keisuke Ohdaira	1	15	3	5
104	Suresh Sundaram	1	15	4	5
104	Abderrahim Ramdane	1	15	2	3
111	Сергей Филиппов	2	24	1	1
111	Fang-Fang Ren	2	23	2	1
111	Seung-Eon Ahn	1	14	1	1
111	Yuan Zhao	1	14	1	2
111	Sanghun Jeon	1	14	3	4
111	Dun-Jun Chen	2	23	1	1
111	기욱 김	1	14	1	2
111	Jong In Kim	1	14	1	2
111	Dong Zhou	2	23	1	1
111	Sang-Hun Song	3	26	1	2
111	Shi Liu	1	14	2	3
111	Eugeni O Popov	2	24	1	1
111	Calli M Campbell	1	14	1	1
111	Rong Zhang	2	23	1	4
111	Xin-Hao Zhao	1	14	1	2
126	Sean L Rommel	2	15	1	1
126	Mikhail Krishtab	1	13	1	2
126	Shalom J Wind	1	13	1	2
126	David J Smith	3	31	3	8
126	Scott T Retterer	4	33	1	4
126	Jaan Männik	1	13	1	2
126	Alexander P Palov	1	13	1	2
126	Matt Hardy	1	13	1	2
126	David J Smith	2	22	4	6
126	Mikhail Baklanov	1	13	6	6
126	Jan Doise	1	13	1	1
126	Da Yang	1	13	1	1
126	Sheng Wang	1	13	1	1
126	D Scott Katzer	1	13	1	2
126	Tatyana Rakhimova	1	13	2	4
126	Vittorio Pellegrini	1	13	2	9
126	Brian P Downey	1	13	1	2
126	Diego Scarabelli	1	13	1	1
126	Kunal Bhatnagar	2	15	1	1
146	Pavel Ps Kaplya	1	12	1	1
146	Seong-soo Choi	1	12	2	1
146	Li Zheng	1	12	2	5
146	Stefan P Svensson	1	12	1	2
146	Jim Browning	1	12	1	1
146	Tobias Erlbacher	2	12	1	1
146	Jihyun Kim	2	21	1	6
146	Joshua M O Zide	1	12	1	2
146	Dmitry S Efremenko	1	12	1	1
146	Hyuck Choo	1	12	1	1
146	Alexander S Gryazev	1	12	1	1
146	Li Ning Liu	1	12	1	2
146	Namkyoo Park	1	12	2	7
146	Ming-Chieh Lin	1	12	1	1
146	Wendy L Sarney	1	12	2	5
146	Kevin S Jones	2	17	1	1
146	David N Smithe	1	12	1	1
164	Satoshi Hamaguchi	1	11	2	5
164	Won-Ho Lee	1	11	1	2
164	Henning F Poulsen	1	11	1	3
164	Paolo Lorenzi	1	11	1	1
164	Hu Li	1	11	2	2
164	Rosario Rao	1	11	2	2
164	Jun-ichi Shirakashi	4	29	1	1
164	Kenneth A Goldberg	2	16	2	2
164	Andrea C Timm	2	18	1	1
164	Christopher N Anderson	1	11	1	1
164	Hugh Wb Simons	1	11	1	3
164	Jörg Hübner	1	11	1	1
164	Ole Hansen	1	11	4	11
164	Maxime Darnon	4	37	1	2
164	Jonathon L Schad	1	11	1	1
164	Fernanda Irrera	1	11	1	1
164	Frederik Stöhr	1	11	1	1
164	Antoine Wojdyla	1	11	2	2
164	Mitchel J Doktycz	3	20	1	4
164	Leonidas E Ocola	3	20	1	2
164	Greg Denbeaux	1	11	1	1
164	Anders Clemen Jakobsen	1	11	1	1
164	Eom-Ji Kim	1	11	1	1
187	Phillip S Dobson	1	10	1	2
187	Yunfei Ge	1	10	1	1
187	Abdelatif Jaouad	1	10	1	1
187	Vincent Aimez	1	10	1	1
187	Takashi Kato	1	10	1	1
187	Agham B Posadas	1	10	2	4
187	Marcel Junige	1	10	1	1
187	Jonathan M R Weaver	1	10	1	1
187	Anand Bhattacharya	1	10	3	3
187	Hantian Gao	1	10	1	1
187	Thiago A De Assis	1	10	1	4
187	L J Brillson	1	10	1	2
187	Richard C Hatch	1	10	1	1
187	Gaurav Nanda	1	10	1	2
187	Emile Van Veldhoven	1	10	1	2
202	Norman R Fong	1	9	1	2
202	Mitsuki Ito	2	10	1	2
202	Shashank Pandey	1	9	1	1
202	Debaleen Biswas	1	9	1	1
202	Gregory L Snider	1	9	1	1
202	Hideo Hosono	1	9	11	23
202	Makoto Miyoshi	1	9	2	4
202	Florian Lazarevic	1	9	1	2
202	Jun Taniguchi	1	9	3	2
202	Roman Leitsmann	1	9	1	2
202	R Niall Tait	2	13	1	3
202	Hidenori Hiramatsu	1	9	4	6
202	Supratic Chakraborty	1	9	1	1
202	Pierre Berini	2	13	2	10
202	Toshio Kamiya	1	9	5	10
202	Ajay Nahata	1	9	1	4
202	Jonas Sundqvist	1	9	1	2
202	Mark Hagmann	1	9	1	1
202	Alexei O Orlov	1	9	2	4
202	Ivan I Kravchenko	4	21	1	5
202	Anil Kumar Sinha	1	9	1	1
202	Mark J Hagmann	1	9	1	1
202	Fan-Yong Ran	1	9	1	5
202	Golnaz Karbasian	1	9	1	1
226	Hyunjung Kim	1	8	3	14
226	Shijie Xu	1	8	1	10
226	De-Sheng Jiang	1	8	1	2
226	Lourdes G Salamanca-Riba	1	8	3	3
226	Dominik Metzler	1	8	1	1
226	Jianping Liu	1	8	1	3
226	Aiqin Tian	1	8	1	4
226	Deying Xia	1	8	1	1
226	Robert L Bruce	1	8	1	3
226	Gottlieb S Oehrlein	1	8	1	3
226	S U Engelmann	1	8	1	2
226	Changhee Lee	1	8	6	10
226	Hyeongtag Jeon	1	8	3	6
226	David J Gosztola	1	8	2	8
226	John Notte	1	8	2	1
226	Thomas Pertsch	1	8	5	11
226	De-Gang Zhao	1	8	1	5
226	Scott G Walton	1	8	1	3
226	Frank Schrempel	1	8	1	3
226	Woochool Jang	1	8	3	4
226	Andreas Tünnermann	1	8	4	6
226	Sebastian Engelmann	1	8	1	1
226	Heeyoung Jeon	1	8	2	3
249	Rafael A Mayer	1	7	1	1
249	Zhe Wu	1	7	1	2
249	Vincent M Donnelly	1	7	1	3
249	Michael Widom	1	7	1	2
249	Demetre J Economou	1	7	1	3
249	Xuda Hong	1	7	1	2
249	Randall Feenstra	1	7	1	5
249	Dan Xia	1	7	2	5
249	Gang Li	2	8	1	9
249	Jianlong Liu	1	7	1	1
249	Marcos V Puydinger Dos Santos	1	7	1	1
249	Mingdong Dong	1	7	7	21
249	Baoqing Zeng	1	7	1	1
249	SangHyeon Kim	1	7	1	7
249	Fanny Béron	1	7	1	3
249	Hosung Kim	1	7	1	2
249	Xiaobing Wang	1	7	3	14
249	Gregory S Herman	1	7	1	5
249	Nannan Li	1	7	1	1
249	John R Dutcher	1	7	1	3
249	José Alexandre Diniz	1	7	1	1
249	Dmitry G Kvashnin	1	7	3	5
249	Ryan T Frederick	1	7	1	1
249	Zheng Zhou	1	7	1	3
249	Jae-Eun Pi	1	7	1	3
249	Qin Gao	1	7	1	1
249	Camron Kouhestani	2	8	1	1
276	Lingqian Chang	1	6	2	9
276	Geun Young Yeom	1	6	5	14
276	Boris Hudec	1	6	1	2
276	Alica Rosová	1	6	1	5
276	Soichiro Tsujino	3	9	1	1
276	Susumu Iida	1	6	2	1
276	Dagmar Gregusova	2	9	1	2
276	Chiwon Lee	1	6	1	1
276	Svetan M Ratchev	1	6	2	3
276	Chi-Ling Chiang	1	6	1	9
276	Natarajan Muthusamy	1	6	2	7
276	Wojciech Głuszewski	1	6	2	2
276	Brian Bennett	1	6	2	2
276	Christophe Licitra	1	6	1	3
276	Daniel Gallego-Perez	1	6	1	6
276	Robert Mroczyński	1	6	1	2
276	Hsien-Yu Liao	1	6	1	1
276	Mir Masoud Seyyed Fakhrabadi	1	6	1	4
276	Joel Segal	1	6	1	5
276	Karol Frohlich	2	12	1	2
276	Jordi Suñe	1	6	5	9
276	Enrique A Miranda	1	6	5	6
276	R J Dwayne Miller	2	11	1	14
276	André-Pierre Blanchard-Dionne	1	6	1	1
304	William C Trogler	1	5	1	3
304	Robert Bücker	1	5	1	2
304	Jie Xu	1	5	1	2
304	Andrew C Kummel	1	5	1	6
304	Shalaka A Kamble	1	5	1	1
304	Ian L Pegg	2	7	1	1
304	Haider Zia	1	5	1	1
304	Youngjae Kim	1	5	1	2
304	Kunji Chen	1	5	1	6
304	Hyunchul Sohn	1	5	1	2
304	Yunqing Cao	1	5	1	3
304	Takashi Ogawa	1	5	2	2
304	Siddheswar Maikap	1	5	2	4
304	Iacopo Mochi	1	5	1	2
304	Bishnu R Dahal	2	7	1	1
304	Yuriko Seino	2	5	1	3
304	Jie Xu	1	5	1	1
304	Pierre Legagneux	2	9	1	1
304	Alexander Liberman	1	5	1	1
304	Katsuyoshi Kodera	2	5	1	4
304	Oliver Gröning	1	5	1	7
325	Justin D Holmes	1	4	7	18
325	Volker Nock	1	4	1	3
325	Wei Wu	2	6	2	3
325	Jian-Hua Jiang	1	4	2	5
325	Aman Haque	1	4	1	4
325	Yuhan Yao	1	4	2	2
325	Sung Woon Cho	1	4	1	5
325	Ripon Dey	1	4	1	1
325	Clément Hébert	1	4	1	5
325	Roberto Caputo	1	4	1	6
325	Evelyne Salancon	1	4	1	1
325	Philippe Bergonzo	1	4	3	9
325	Grzegorz Lupina	1	4	1	3
325	Yordan M Georgiev	1	4	1	6
325	Yong Chen	1	4	3	9
325	Boxiang Song	1	4	2	2
325	Wei Gao	1	4	5	18
325	Yifei Wang	2	6	1	1
325	Jin Jang	1	4	5	9
325	Yong Chen	1	4	3	7
325	Yoshihiko Hirai	1	4	2	3
325	Isha Mutreja	1	4	1	4
325	Mark A Wistey	1	4	1	1
325	Hyung Koun Cho	1	4	2	8
325	Sajeev John	1	4	1	2
325	Shawn-Yu Lin	1	4	1	2
325	Jason C Verley	1	4	1	1
325	Seonghoon Jeong	1	4	1	2
325	Yuanrui Li	2	6	1	2
325	Ping Kuang	1	4	1	2
325	Behnam Banan	1	4	1	1
356	Jun Hong Park	1	3	1	4
356	Ian Lacey	1	3	1	2
356	Sungwook Mhin	1	3	1	5
356	Jiang Zhuangde	1	3	1	5
356	Christian Wagner	1	3	1	1
356	Sangyeob Lee	1	3	2	3
356	Edmund Dobrocka	1	3	1	4
356	Gang Niu	1	3	1	2
356	Idalia Mig Gómez	1	3	1	2
356	Aldo Di Carlo	1	3	5	26
356	Seong-Yong Cho	1	3	1	2
356	Martin Mikulics	1	3	1	8
356	Shuming Yang	1	3	2	4
356	Marek Malac	1	3	2	3
356	Татьяна Андреева	1	3	1	1
356	Valeriy V Yashchuk	1	3	2	3
356	Marina E Bedrina	1	3	1	1
356	Mehmet Z Baykara	1	3	1	4
356	Lakshmi RajeswaraRao Langoju	1	3	1	2
356	Narendra Chaudhary	1	3	1	1
356	David Ferry	1	3	2	3
356	Hiroshi Fukuda	1	3	1	1
356	Kyoung-Kook Kim	1	3	1	2
356	Hongshi Sang	1	3	1	2
356	Hyun-Mi Kim	1	3	2	3
356	Sergey Babin	1	3	1	1
356	Richard Akis	1	3	1	3
356	Bobo Liu	1	3	1	1
356	Sung-Nam Lee	1	3	1	3
356	Yunsheng Qian	1	3	1	1
356	Martina Luysberg	1	3	1	8
356	Jeong Ho Ryu	1	3	1	3
356	Regina Hoffmann-Vogel	1	3	1	1
356	Nathalie Bouet	1	3	3	5
356	Chee Won Chung	1	3	3	3
356	Berkin Uluutku	1	3	1	1
356	Juergen Schubert	1	3	2	7
356	Hilde H Hardtdegen	1	3	1	7
356	Sibylle Gemming	1	3	1	6
356	Zhao Wang	1	3	1	4
356	Peng Shi	1	3	2	3
356	Filip Gucmann	1	3	1	1
356	Wayne McKinney	1	3	1	3
356	Emanuela Tamburri	1	3	3	6
356	Carsten Ronning	1	3	2	7
356	Koki Tanaka	1	3	1	1
356	Misa Hayashida	1	3	1	2
356	Jörg Schuster	1	3	2	4
356	Peter Zahn	1	3	1	1
356	Su Min Hwang	1	3	3	4
356	Hannes Mähne	1	3	1	1
356	Parshu Gyawali	1	3	1	1
356	Kiruba Mangalam Subramaniam	1	3	1	2
356	Saroj Kumar Patra	1	3	1	1
411	Xuesen Zhao	1	2	1	1
411	Vladimir Umansky	1	2	3	6
411	Vanessa Iglesias	1	2	1	3
411	Javier Martin	2	3	2	2
411	Enrique Escobedo-Cousin	1	2	1	1
411	Larry J Millet	1	2	1	2
411	Mireia Bargallo Gonzalez	1	2	2	4
411	Marc Porti	2	3	1	4
411	Francesca Campabadal	1	2	2	4
411	Anna Pyayt	1	2	1	1
411	David Goldhaber-Gordon	1	2	2	6
411	Shiyuan Liu	1	2	4	7
411	Anthony O'Neill	1	2	1	2
411	Tetstuo Shimizu	1	2	1	1
411	Hao Jiang	1	2	2	3
411	Helena Castán	1	2	2	6
411	Matthew J Goeckner	1	2	1	2
411	Michael R C Hunt	1	2	1	1
411	H Castán	1	2	2	6
411	David M Stewart	1	2	1	4
411	Xiao Zhang	1	2	1	2
411	Viswas Sadasivan	1	2	1	1
411	Xavier Aymerich	2	3	1	2
411	Xiuguo Chen	1	2	2	6
411	Hyun S Kum	1	2	1	1
411	Venkat R Bhethanabotla	1	2	1	5
411	Liang Xu	1	2	1	2
411	Yan Yongda	1	2	1	7
411	Montserrat Nafria	2	3	2	6
411	Hao Jiang	1	2	1	4
411	Yanquan Geng	1	2	1	6
411	Hector Garcia	1	2	2	6
411	Liann-Be Chang	1	2	1	4
411	Andrew J Keller	1	2	1	2
411	Joan Marc Rafí	1	2	1	1
411	Carlos Couso	1	2	1	1
411	Rui Guo	1	2	1	1
411	Jun-Youn Kim	1	2	1	1
411	Bowen Yu	1	2	1	2
411	Toby Hopf	1	2	1	1
411	Surya Cheemalapati	1	2	1	1
411	Joosung Kim	1	2	1	2
411	Youngsoo Park	1	2	1	2
455	Sergey Shleev	1	1	1	6
455	Sangseom Jeong	1	1	4	7
455	Gyorgy Csaba	1	1	3	4
455	Michael T Niemier	1	1	1	4
455	Mojtaba Kahrizi	1	1	1	1
455	Marin Soljačić	1	1	4	11
455	Chris Jacobsen	1	1	1	8
455	Lars Montelius	1	1	1	6
455	Celal Con	1	1	1	1
455	Ludovic Desplanque	1	1	1	4
455	Rosana Rodriguez	1	1	2	4
455	Kenan Li	1	1	1	2
455	Youngmin Kim	1	1	1	1
455	Dmitry B Suyatin	1	1	2	5
455	Syed Dinara	1	1	1	2
455	Blas Cabrera	1	1	1	2
455	Per-Ake Nilsson	1	1	1	3
455	Chin-Lung Cheng	1	1	1	1
455	Ivan Maximov	1	1	1	4
455	Patrick Helfenstein	1	1	1	1
455	Christophe Gaquiere	1	1	2	7
455	Syed Mukulika Dinara	1	1	1	2
455	Dhrubes Biswas	1	1	1	5
455	Gary H Bernstein	1	1	2	7
480	Brad R Conrad	1	0	1	2
480	Qingfeng Yan	1	0	1	13
480	Tedi Kujofsa	1	0	2	3
480	Zhi-Biao Hao	1	0	1	5
480	Nathanael D Cox	1	0	1	4
480	Eugenie Martinez	1	0	1	0
480	Sudhiranjan Tripathy	1	0	1	6

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