Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

1.3(top 50%)

impact factor

4.0K(top 5%)

papers

33.3K(top 10%)

citations

48(top 20%)

h-index

1.4(top 50%)

extended IF

4.0K

all documents

34.2K

doc citations

78(top 10%)

g-index

Top Authors (by article citations)

#	Author	Articles	Citations	R ARank	R CRank
1	Geoffrey W Burr	1	276	1	1
1	Hyunsang Hwang	1	276	2	1
1	Kibong Moon	1	276	1	1
1	Alvaro Padilla	1	276	1	1
5	Gregor Hlawacek	1	170	1	1
6	Philip X-L Feng	1	113	2	2
6	Zenghui Wang	1	113	2	2
6	Rui Yang	1	113	1	1
6	Xu-Qian Zheng	1	113	1	1
10	Patrick D Lomenzo	1	110	1	1
10	Xiahan Sang	1	110	2	2
10	Peng Zhao	1	110	1	1
10	Chris Fancher	1	110	1	1
10	Toshikazu Nishida	1	110	3	2
10	James LeBeau	1	110	2	2
10	Saeed Moghaddam	1	110	2	1
10	Jacob Jones	1	110	5	5
10	Qanit Takmeel	1	110	1	1
10	Everett D Grimley	1	110	2	1
21	Luis de los Santos Valladares	1	65	2	2
21	Crispin H W Barnes	1	65	1	1
21	Stuart Holmes	1	65	1	1
21	Yutaka Majima	1	65	1	1
21	Matteo Barbone	1	65	1	1
26	Vibhor Kumar	1	55	1	1
26	Jamil Akhtar	1	55	1	1
28	Stephanie A Law	1	51	1	1
28	Daniel Wasserman	1	51	3	2
28	Runyu Liu	1	51	1	1
32	Mantu Hudait	1	46	2	3
32	Shashank Priya	1	46	9	8
32	Deepam Maurya	1	46	2	3
32	Nikhil Jain	1	46	1	2
36	Claudia Felser	1	45	4	7
36	Andreas Hütten	1	45	1	1
36	Claudia Felser	1	45	7	9
36	Gerhard H Fecher	1	45	2	2
36	Changhai Wang	1	45	1	1
36	Benjamin Balke	1	45	1	4
42	José Cotrino Bautista	1	42	2	3
42	M Carmen López-Santos	1	42	2	3
42	Alberto Palmero	1	42	1	1
42	Rafael Alvarez	1	42	1	1
42	Victor J Rico	1	42	1	2
42	Agustín R. González-Elipe	1	42	4	5
42	Angel Barranco	1	42	1	2
42	Julian Parra-Barranco	1	42	1	1
50	Chenggong Wang	1	41	2	5
50	Yong-li Gao	1	41	4	8
53	Robert M Wallace	3	74	4	7
53	Stephen J Mcdonnell	3	74	2	4
53	Lorenzo Mangolini	1	40	1	2
53	John N Randall	3	67	1	1
53	Sanjay Krishna	1	40	5	3
53	Yves Chabal	2	56	3	6
60	Randall Feenstra	1	36	1	3
60	Sergio C De La Barrera	1	36	1	2
60	Ratan Debnath	1	36	1	1
60	Albert Davydov	1	36	1	2
60	Dipak Paramanik	1	36	1	1
60	Matthew R King	2	59	1	1
60	Qin Gao	1	36	1	1
60	Abhishek Motayed	1	36	1	2
69	Richard A Soref	1	34	2	4
69	Wei Du	1	34	2	4
69	Seyed Amir Ghetmiri	1	34	2	4
69	Shui-Qing Yu	1	34	1	2
69	Greg Sun	1	34	3	5
69	Richard A Soref	1	34	2	3
69	Joe Margetis	1	34	2	3
69	Aboozar Mosleh	1	34	2	4
77	Yuan Zhao	1	33	1	2
77	Yong-Hang Zhang	2	58	1	1
77	Ivo W Rangelow	1	33	3	2
77	Shi Liu	2	58	1	1
77	Marcus Kaestner	1	33	2	1
77	Steve Lenk	1	33	1	1
77	Xin-Hao Zhao	2	58	1	1
84	Gerd Duscher	1	28	3	6
84	Jeff De Hosson	1	28	4	9
84	Junjun Ding	1	28	1	1
84	Prashant K Sharma	1	28	1	1
84	Philip D Rack	1	28	2	7
84	Ke Du	1	28	1	1
84	Frank T Fisher	1	28	1	2
84	Eui-Hyeok Yang	1	28	1	1
84	Ishan Wathuthanthri	1	28	1	1
84	Rajendra Timilsina	1	28	1	1
94	M J Gordon	1	27	1	2
94	Lesley Chan	1	27	1	2
97	Shida Tan	1	26	1	1
98	David J Smith	4	42	1	4
98	Jonathan Boltersdorf	1	25	1	1
98	Celal Con	1	25	1	1
98	Shane Johnson	2	40	1	1
98	Paul A Maggard	1	25	2	3
98	Daniel B Dougherty	2	30	1	3
98	Xiaogan Liang	1	25	2	3
98	Preston	1	25	1	1
98	David J Smith	4	42	1	3
98	Jing Lu	1	25	1	1
98	Jingying Wang	1	25	1	1
98	Sungjin Wi	1	25	2	3
98	Faycal Saffih	1	25	1	1
98	Preston T Webster	1	25	1	1
98	Chaturvedi Gogineni	1	25	1	1
98	Mikai Chen	1	25	2	3
115	Songrui	1	24	2	4
115	Makoto Kuwahara	1	24	1	2
115	Jaesoo Ahn	1	24	1	1
115	Han-Ping Chen	1	24	1	2
119	Nabil El-Hinnawy	1	23	1	3
120	Ingo Dirnstorfer	1	22	1	2
120	Peijun Guo	1	22	2	5
120	Jianguo Lu	1	22	1	5
120	Dawen Li	1	22	1	2
120	Feng Liang	1	22	2	8
120	Xi-Feng Li	1	22	1	4
120	Thomas Mikolajick	1	22	5	17
120	John Bowers	1	22	8	15
120	Nanjia Zhou	1	22	3	8
120	Kyeiwaa Asare-Yeboah	1	22	1	1
120	Chong Zhang	1	22	1	4
131	Yoshinori Takao	1	21	2	3
131	Koji Eriguchi	1	21	2	2
133	Stephen J Pearton	9	115	1	1
133	Casey M Schwarz	1	20	1	1
133	Fan Ren	2	27	1	2
133	Jennifer K Hite	1	20	5	8
133	Virginia D Wheeler	2	33	1	1
133	Michael A Mastro	1	20	2	2
133	Ivan I Kravchenko	2	35	1	7
133	Ya-Hsi Hwang	1	20	1	2
141	Alexander Y Polyakov	3	33	1	2
141	Uthirakumar Periyayya	1	19	1	3
141	Nikolai B Smirnov	2	25	1	3
144	Tomoji Ohishi	1	18	1	1
144	Barry Brennan	1	18	2	2
144	Toshihide Nabatame	1	18	3	2
144	Akihiko Ohi	1	18	1	1
148	J-F De Marneffe	1	17	1	1
148	S W King	1	17	5	5
148	Kenneth A Goldberg	1	17	1	1
148	Markus Heyne	1	17	1	1
148	William A Lanford	1	17	1	2
148	Han Li	1	17	1	2
148	Todd W Hudnall	1	17	1	3
148	Mikhail Baklanov	1	17	2	4
148	Yue Kuo	2	28	1	2
148	Shu-Mao Zhang	1	17	2	1
148	Vicky Philipsen	1	17	1	1
148	Wilkin Tang	1	17	1	1
148	Patrick Henry	1	17	1	1
148	Shumao Zhang	1	17	1	1
148	Bruce W Smith	1	17	1	1
148	Chi-Chou Lin	2	28	1	2
164	Lu Liu	1	16	1	1
164	Kazushi Hayashi	1	16	1	1
164	Dr M K Bera	1	16	3	2
164	Artur Domingues Tavares De Sá	1	16	1	1
164	Junichiro Kono	1	16	4	7
164	Jihyun Kim	2	19	1	3
164	V T A Oiko	1	16	1	1
164	Helmut Schift	2	26	1	2
164	Giulia Di Domenicantonio	1	16	1	1
164	Robert Kirchner	1	16	1	2
164	Varlei Rodrigues	1	16	1	1
164	Don D Dick	1	16	1	1
164	Gail J Brown	1	16	1	3
164	Sarab Preet Singh	1	16	1	1
178	Dong Wang	1	15	1	6
178	Xavier Chevalier	1	15	1	3
178	Craig B Arnold	1	15	3	5
178	Raluca Tiron	1	15	2	5
178	Keigo Kasuya	1	15	1	1
178	Maxime Darnon	1	15	1	3
178	Alexander G Milekhin	1	15	2	3
178	Hongwei Liang	1	15	2	3
178	Dietrich R.T. Zahn	3	32	2	7
178	Peter Schaaf	1	15	3	9
178	Tadao Furutsu	1	15	1	1
178	Takeshi Kawasaki	1	15	1	1
178	Evgeniya S Sheremet	2	29	2	2
178	Raul D Rodriguez	2	29	2	2
178	Dongsheng Fan	1	15	1	1
178	Shihyun Ahn	1	15	1	1
178	Stephen Y Chou	1	15	1	4
178	John Cannarella	1	15	3	4
178	Shoham Bhadra	1	15	1	1
198	Michelle A Pillers	1	14	1	1
198	Dr S Maidul Haque	1	14	1	1
198	Rudolf Bratschitsch	1	14	2	5
198	Pankaj R Sagdeo	1	14	1	3
198	Takashi Yanagishita	2	15	1	2
198	F R M Palumbo	1	14	2	2
198	Steffen Michaelis de Vasconcellos	1	14	1	2
198	Marya Lieberman	1	14	1	2
198	Srinivasan Anand	1	14	1	4
198	Reza Sanatinia	1	14	1	2
198	Moshe Eizenberg	1	14	2	3
198	Sven Van Elshocht	1	14	1	4
210	Alain C Diebold	3	26	1	2
210	Shijie Xu	2	22	1	2
210	Sung-Min Yoon	1	13	2	2
210	Jonathan Abbott	1	13	1	1
210	De-Sheng Jiang	2	22	1	2
210	Arshad Khan	1	13	1	3
210	Neeraj Nepal	1	13	2	2
210	Shixuan Du	1	13	3	12
210	Girish Malladi	1	13	2	3
210	Hooman Mohseni	1	13	3	3
210	Akhlesh Lakhtakia	1	13	5	7
210	Richard R Vanfleet	1	13	1	2
210	Xu Wu	1	13	1	2
210	Hui Chen	1	13	1	2
210	Kai Yang	1	13	1	2
210	Xin Tang	1	13	1	1
210	Wen-Di Li	1	13	2	2
210	David J Meyer	1	13	1	2
210	Sudhiranjan Tripathy	1	13	1	3
210	Arshad Khan	1	13	1	1
210	D Scott Katzer	1	13	1	2
210	David F Storm	1	13	1	1
210	Wende Xiao	1	13	1	2
210	Thirumaleshwara N Bhat	1	13	1	1
210	Alireza Bonakdar	1	13	2	2
210	Eom-Ji Kim	1	13	1	1
236	Geoffrey Beach	1	12	3	4
236	Iftikhar Ahmad	1	12	4	9
236	Asif Khan	1	12	2	1
236	Cheol Seong Hwang	2	21	4	12
236	Yoshihiko Hirai	4	31	1	1
236	Marc A Baldo	1	12	1	7
236	Larysa Tryputen	1	12	1	1
236	Vimal Kamineni	1	12	1	1
236	Sang Young Lee	1	12	1	3
245	Sven Rodt	1	11	1	1
245	Wei Wu	2	20	1	4
245	Yuhan Yao	2	20	1	1
245	Stephan Reitzenstein	1	11	2	3
245	Yifei Wang	1	11	1	1
245	Hieu Pham Trung Nguyen	1	11	1	5
245	Kyeongjae Cho	1	11	2	8
245	Roberto C Longo	1	11	1	3
245	Manuel Gschrey	1	11	1	1
245	Bo-Tsun Chou	1	11	1	1
255	Marco Francardi	1	10	1	3
255	Patrizio Candeloro	1	10	3	9
255	Per Magnus Kristiansen	1	10	1	3
255	Yasin Ekinci	1	10	2	7
255	Lisa M Porter	1	10	1	3
255	Mingzhao Liu	1	10	1	3
255	Atikur Rahman	1	10	1	3
255	Francesco Gentile	1	10	2	7
255	Konstantins Jefimovs	1	10	1	4
255	Jim Browning	1	10	1	1
255	Kun Tang	2	11	1	2
255	Jian-Dong Ye	1	10	1	2
255	Wing Man Tang	1	10	2	6
255	Robert F Davis	1	10	2	5
255	Jiandong Ye	2	11	1	3
255	Richard J Blaikie	2	13	1	2
255	Subhananda Chakrabarti	1	10	2	2
255	M Laura Coluccio	1	10	3	6
255	Ming-Chieh Lin	1	10	1	1
255	Hemant Ghadi	1	10	1	4
255	Marianna Barberio	1	10	2	5
255	Vaithiyalingam Shutthanandan	1	10	3	7
255	Akshay Agarwal	1	10	1	3
255	Gerardo Perozziello	1	10	3	6
255	Binita Tongbram	1	10	1	1
255	David N Smithe	1	10	1	1
255	Li Huang	1	10	1	2
255	Keith R Evans	1	10	1	3
284	Chihaya Adachi	2	12	4	22
284	Jianping Liu	1	9	1	1
284	Baoshun Zhang	1	9	1	1
284	Regina Luttge	1	9	1	4
284	Sijia Xie	1	9	1	2
284	Jae Kyeong Jeong	1	9	4	6
284	Hyeong Joon Kim	1	9	2	5
284	Noriaki Sanada	2	12	2	3
292	Erik Lind	1	8	3	7
292	Sergio Bietti	1	8	2	4
292	Elisabeth Blanquet	1	8	1	4
292	Isabelle Sagnes	1	8	7	10
292	Eugene Yakimov	2	14	2	2
292	Dr Elisa Maddalena Sala	1	8	1	2
292	Monica Bollani	1	8	3	6
292	Jun Taniguchi	1	8	1	2
292	Lars-Erik Wernersson	1	8	5	16
292	Dooyoung Hah	1	8	1	1
292	Chao-Sung Lai	1	8	4	14
292	Konstantinos Pantzas	1	8	1	2
292	Gilles Patriarche	1	8	5	16
292	Stefano Sanguinetti	1	8	2	5
292	Martin Feldman	1	8	1	1
292	Alexey Fedorov	1	8	1	2
292	Chia-Ming Yang	1	8	1	3
292	Tapio Mäkelä	1	8	1	1
292	Theda Daniels-Race	1	8	2	2
292	Pavel Vegeles	1	8	1	1
292	Christophe Cardinaud	1	8	1	1
292	Ajey P Jacob	1	8	1	2
292	Elvedin Memisevic	1	8	1	2
292	Ahmed Rhallabi	1	8	1	3
292	Stéphane Guilet	1	8	1	3
292	José María Ripalda	1	8	1	1
292	Huseyin Ekinci	1	8	1	1
292	In-hwan Lee	1	8	1	5
292	Jeonghwan Kim	1	8	1	1
292	Lee-Woon Jang	1	8	1	4
322	Yan-Feng Chen	2	12	3	11
322	Soichiro Tsujino	1	7	1	2
322	Sanjay Kumar Mandal	1	7	1	3
322	Tapan Nath	1	7	4	7
322	Daniela Gogova	1	7	1	4
322	Zhe Zhuang	1	7	1	2
322	Huili Grace Xing	2	11	2	8
322	Kye Hyun Baek	2	9	1	2
322	Debdeep Jena	1	7	2	8
322	Xiaodong Yan	1	7	1	2
322	Chonghun Han	2	9	1	5
322	Shun Li	1	7	1	3
322	Bin Liu	1	7	3	8
322	Feixiang Wu	1	7	3	6
322	Patrick J Fay	1	7	4	7
322	Camilo Velez	1	7	1	2
322	Erin Patrick	1	7	1	3
322	Yuanzheng Yue	1	7	1	2
341	I-Nan Lin	1	6	4	10
341	Esteban Cruz-Hernandez	1	6	1	1
341	Ripon Dey	1	6	1	1
341	Maximo Lopez-Lopez	1	6	1	3
341	Tedi Kujofsa	1	6	1	1
341	Siddharth Karkare	1	6	1	2
341	Luis Zamora	1	6	1	1
341	Ganesh Balakrishnan	2	9	1	4
341	José Vulfrano González-Fernández	1	6	1	1
341	Maarten P De Boer	1	6	2	6
341	Evaldo José Corat	1	6	5	8
341	Divani Barbosa	1	6	1	1
341	Javier Bravo	1	6	1	1
341	Srinivasu Kunuku	1	6	2	4
341	George Barbastathis	1	6	1	1
341	Ivan Bazarov	1	6	1	3
341	Shoou-Jinn Chang	1	6	5	10
341	Bruce Dunham	1	6	1	3
360	Lin Zhou	1	5	1	6
360	Shao-Yen Chiu	1	5	1	1
360	Menelaos K Poutous	1	5	1	3
360	Di Wu	1	5	2	8
360	Karl K Berggren	1	5	3	8
360	Xin Hu	1	5	1	4
360	Tao Xue	1	5	1	1
360	Guopeng Chen	1	5	2	2
360	Anupam Madhukar	1	5	1	2
360	Aidong Shen	1	5	2	2
360	Chun Liang Liu	1	5	2	4
360	Siyuan Lu	1	5	1	1
360	Jae-Byum Chang	1	5	1	3
360	Sima Dimitrijev	1	5	1	7
360	Zheng-Yi Cao	1	5	1	2
360	Xiao-Jie Liu	1	5	1	4
360	Faisal Mohd-Yasin	1	5	1	2
360	Wujun Mi	1	5	1	1
360	Lai, Pt	1	5	5	6
360	Jiefei Zhang	1	5	1	1
360	Seong Jun Kang	1	5	1	5
360	Lin Zhou	1	5	1	6
360	Robert J Nemanich	1	5	3	9
360	Di Wu	1	5	2	9
360	Ai-Dong Li	1	5	3	7
360	Yeonjin Yi	1	5	1	9
360	Jialing Yang	1	5	1	5
360	Peter Nillius	1	5	1	1
388	Colin A Wolden	1	4	1	7
388	Alan C Seabaugh	1	4	2	5
388	Lai Wang	1	4	2	3
388	Michael Mühlberger	1	4	1	2
388	Scott T Retterer	1	4	2	8
388	Dale K Hensley	1	4	1	6
388	Kuniharu Takei	1	4	3	8
388	Kin Leong Pey	1	4	2	5
388	Jessica Andriolo	1	4	1	1
388	Ying Wang	1	4	1	1
388	Heinz Wanzenböck	1	4	3	6
388	Bernadeta R Srijanto	1	4	2	5
388	Seiji Akita	1	4	3	7
388	Yong-Cheol Kang	1	4	1	5
388	Yihong Wu	1	4	1	2
388	Yumeng Yang	1	4	1	2
388	Michel Bosman	1	4	3	11
388	James H Edgar	1	4	3	6
388	Michael A Reshchikov	1	4	5	6
388	Emmerich Bertagnolli	1	4	4	8
388	Harry M Meyer	1	4	5	19
388	Milad Gharooni	1	4	1	1
388	Yuen-Yee Wong	1	4	1	3
388	Heinz D Wanzenboeck	1	4	3	5
388	Kristof Tahy	1	4	1	1
388	Jack L Skinner	1	4	1	1
388	Jessica M Andriolo	1	4	1	1
415	Dipankar Das Sarma	1	3	3	14
415	Rudra Pratap	1	3	1	4
415	Hiroyuki Nishikawa	1	3	1	1
415	Mostafa Masnadi-Shirazi	1	3	1	2
415	Young Yu	1	3	1	1
415	Jinho Ahn	1	3	3	3
415	Christoph Cobet	1	3	2	4
415	Jin Zou	1	3	7	18
415	Jiwan Kim	1	3	2	7
415	Sarbajit Banerjee	1	3	4	10
415	Paul R. Chalker	1	3	2	6
415	Jae Hyo Park	1	3	1	2
415	Qi Wang	2	4	1	2
415	Yaping Dan	1	3	1	3
415	Hermann Detz	1	3	3	6
415	Srinivasan Raghavan	1	3	1	1
415	Jun Luo	1	3	3	5
415	Thomas Tiedje	1	3	1	1
415	So Jeong Park	1	3	2	3
415	Aaron Maxwell Andrews	1	3	3	7
415	Xiaomin Ren	1	3	3	4
415	Kang L Wang	1	3	2	9
415	Yong Wang	1	3	2	11
415	Gottfried Strasser	1	3	4	8
415	Munib Wober	1	3	1	2
415	Xia Zhang	1	3	2	3
415	Kenneth B Crozier	1	3	2	7
415	Werner Schrenk	1	3	2	4
415	Gyu-Tae Kim	1	3	2	5
415	Yongqing Huang	1	3	1	2
415	Winnie N Ye	1	3	2	5
415	Stephane Evoy	1	3	1	5
415	Shamsul Arafin	1	3	1	4
415	Parshu Gyawali	1	3	1	1
415	Sean W Depner	1	3	1	2
450	Steinar Raaen	1	2	1	1
450	Katsuhisa Murakami	1	2	2	3
450	Kostya K Ostrikov	1	2	12	33
450	Olga	1	2	1	3
450	Martin M Frank	1	2	3	3
450	Michael K Connors	1	2	1	1
450	Jens Falta	1	2	1	4
450	Andreas Kyritsakis	1	2	1	2
450	Masahiko Kondow	1	2	1	3
450	Fumitaro Ishikawa	1	2	1	4
450	Onkar Mangla	1	2	1	4
450	Choi, Hw	1	2	2	3
450	Jan Ingo Flege	1	2	1	3
450	Thomas Schmidt	1	2	1	3
450	Byung I Kim	1	2	1	1
450	Catherine Dubourdieu	1	2	1	2
466	Ewa Grzanka	1	1	1	4
466	Piotr Perlin	2	1	1	7
466	Marcin Kryśko	1	1	1	1
466	Charanjit Singh Bhatia	1	1	4	14
466	Grzegorz Muziol	2	1	1	5
466	Paolo Lorenzi	1	1	1	1
466	Steven Consiglio	1	1	1	3
466	Rosario Rao	1	1	1	1
466	Hazrat Hussain	1	1	3	12
466	Youwei Jiang	1	1	1	1
466	Julita Smalc-Koziorowska	2	1	1	4
466	Henryk Turski	2	1	1	5
466	Masakazu Ichikawa	1	1	1	3
466	Mohammad S M Saifullah	1	1	1	2
466	Binhao Wang	1	1	1	2
466	Czeslaw Skierbiszewski	2	1	1	7
466	Yoshiaki Nakamura	1	1	3	5
466	Gottlieb S Oehrlein	1	1	3	4
466	Marta Sawicka	2	1	1	1
466	Anna Feduniewicz-Żmuda	1	1	1	1
466	Saifullah Idris	1	1	1	9
466	Szymon Grzanka	2	1	1	3
466	Hyunsoo Yang	1	1	5	11
466	Ghim Wei Ho	1	1	3	8
466	Vipul Gupta	1	1	1	3
466	Fernanda Irrera	1	1	1	1
466	Martin Albrecht	1	1	4	7
466	Gregory E Triplett	1	1	1	1
466	Xing Cheng	1	1	1	2
466	Nobuyasu Naruse	1	1	1	1
466	Ramakrishnan Ganesan	1	1	1	1
466	Yutaka Mera	1	1	1	2
466	Anubhav Diwan	1	1	1	2
499	Zbig R Wasilewski	1	0	1	5
499	Stefan Zollner	1	0	3	4
499	Christian Lavoie	1	0	1	3
499	Chris Richardson	1	0	3	5
499	Baoli Liu	1	0	1	2
499	Takahito Ono	1	0	3	11
499	Ahmet S Özcan	1	0	1	3
499	Sylwester Porowski	1	0	1	0
499	Maria Stepanova	1	0	1	3
499	Natalia Fiuczek	1	0	1	0
499	Michael P Bachmann	1	0	7	14
499	Gulten	1	0	2	2
499	Germar Hoffmann	1	0	1	3
499	Naoki Inomata	1	0	1	2
499	Grzegorz Cywinski	1	0	1	4
499	Xin Zhang	1	0	2	5
499	Paweł Wolny	1	0	1	0
499	Walter Hansch	1	0	1	0

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