Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena

1.6(top 20%)

impact factor

12.2K(top 2%)

papers

244.4K(top 2%)

citations

143(top 5%)

h-index

1.6(top 50%)

extended IF

12.2K

all documents

252.7K

doc citations

229(top 5%)

g-index

Top Authors (by article citations)

#	Author	Articles	Citations	R ARank	R CRank
1	Stephen Y Chou	2	1,597	3	1
2	Robert Carpick	1	304	1	2
2	D Frank F Ogletree	1	304	2	4
2	Nicolas Agrait	1	304	2	3
5	Martin Stutzmann	1	272	6	2
6	Alexei Gruverman	1	207	1	2
7	Jueinai Kwo	1	158	1	1
8	Demetre J Economou	1	132	1	1
9	Gil U Lee	1	129	1	2
9	Richard J Colton	1	129	1	1
11	H M Pollock	1	128	1	2
12	Clive J Roberts	2	114	1	1
12	Philip M Williams	2	114	1	1
14	Ernst Meyer	4	240	1	1
15	John S Villarrubia	2	106	1	1
16	Egbert Oesterschulze	3	144	1	1
17	Mohamed Henini	3	121	3	4
17	Simon Bending	1	86	3	2
19	Yves Chabal	1	74	1	1
20	Joseph J Kopanski	1	73	1	1
21	Euclydes Marega Jr	1	72	1	2
21	Pedro Pablo González-Borrero	1	72	1	2
23	Steven Brueck	1	70	2	2
23	Winfried Mönch	1	70	1	3
26	L Howald	1	65	1	2
27	Mikhail Lebedev	1	64	1	1
28	Stella Pang	7	143	1	1
29	Eray S Aydil	1	57	1	2
30	Wilfried Vandervorst	2	59	1	1
30	Javier Tejada	1	56	6	7
30	Nobuhiko P Kobayashi	1	56	1	2
30	Joan Esteve	1	56	1	2
34	Yukinori Morita	1	55	1	1
34	Masakazu Nakamura	1	55	1	1
36	Stephen J Pearton	4	87	5	6
37	Lourdes G Salamanca-Riba	1	47	2	1
38	Niek F Van Hulst	1	45	1	2
39	Kevin L Jensen	5	108	1	1
40	Jonathan Pelz	1	42	1	1
41	Mark A Reed	1	41	3	4
41	Brian Bennett	2	81	2	2
43	Uwe Rossow	2	49	2	2
44	Mark M Banaszak Holl	1	39	2	1
44	G Andrew D Briggs	1	39	3	3
44	Alex L De Lozanne	3	52	1	1
48	Daisuke Fujita	1	37	1	1
48	Jeffrey A Hopwood	1	37	1	1
48	Shin-Ichi Kanemaru	4	100	2	2
51	Marc Gailhanou	1	36	1	1
52	Roland Wiesendanger	3	42	2	6
52	Alain Cappy	1	34	1	1
52	Fabio Iacona	1	34	2	1
52	Harold G Craighead	1	34	1	1
52	Martin Hegner	1	34	1	2
52	Hajime Takano	1	34	1	2
58	David N Mcilroy	1	32	2	2
58	Kunihiko Oka	1	32	2	1
58	Peter A Dowben	1	32	2	5
58	Yoshihiro Aiura	1	32	3	1
62	Steven J Eppell	1	31	1	1
63	Tetsuji Yasuda	1	30	3	4
63	Juan Jose Saenz	2	37	1	4
63	Jose Ignacio Pascual	1	30	1	1
63	Naomi J Halas	1	30	1	2
63	N J Halas	1	30	1	2
68	Robert Claude Woods	1	29	2	2
68	Paul Ruchhoeft	1	29	1	1
70	Fred L Terry	1	28	1	1
70	Toyoko Arai	1	28	1	2
72	Peter Beton	3	52	1	2
72	Jose Maria Gomez Rodriguez	1	26	1	3
72	Philip J Moriarty	2	43	1	2
72	Jiro Matsuo	1	26	5	4
72	Noriaki Toyoda	1	26	1	2
77	Hiroki Hibino	1	25	3	1
77	Srinivasan Anand	1	25	1	1
79	Omar Teschke	1	24	2	2
80	Serge Palacin	1	23	1	3
80	Stefan Heun	1	23	1	1
82	Theo Rasing	1	22	6	7
82	William Palmer	1	22	1	1
82	Hajime Fujikura	1	22	1	1
82	Hideki Hasegawa	2	25	1	1
86	Nickolai I Klyui	1	21	1	1
86	Mark Hagmann	1	21	1	1
86	Mark J Hagmann	1	21	1	1
89	David Ferry	1	20	2	4
89	Yutaka Matsumi	1	20	4	4
91	Lucia Sorba	2	27	3	4
91	Gvido Bratina	2	28	1	1
91	Mathias Göken	1	19	1	2
91	Lothar Bischoff	1	19	1	1
91	Leonidas E Ocola	1	19	1	2
96	Alfredo Pasquarello	1	18	2	4
96	Stephen A Joyce	1	18	1	2
96	Mark S Hybertsen	1	18	2	5
99	Edward T Yu	1	17	1	3
99	Andrey V Zotov	1	17	1	3
99	J Alexander Liddle	1	17	1	1
102	Panagiotis Argitis	1	16	1	2
102	Yasuo Koide	1	16	2	2
102	Stephen J Pennycook	1	16	4	7
102	Takahito Inoue	1	16	1	1
102	Keiji Takata	1	16	1	1
102	Massimo Longo	1	16	1	1
102	Francesco La Via	1	16	2	1
102	Ronaldo D Mansano	1	16	1	1
111	Karen L Kavanagh	3	34	1	1
111	Andrea Sosso	1	15	1	1
111	Detlef Hommel	1	15	8	6
114	Samit K Ray	1	14	2	3
114	Stephen R Leone	1	14	2	2
116	Yue Ying Lau	1	13	3	4
116	Theo Siegrist	1	13	2	4
116	Erik Janzen	1	13	5	7
116	Gary W Rubloff	1	13	1	1
116	Michael J Sailor	1	13	2	3
116	Robert J Hamers	1	13	1	5
116	Rositsa T Yakimova	1	13	1	2
123	Kristiaan Temst	1	12	5	2
123	Gerhard Hobler	1	12	1	4
123	Walerian Arabczyk	1	12	2	2
126	Stefan Malzer	2	17	1	1
126	Charles Tu	3	13	1	3
126	Michael Kneissl	2	17	2	2
129	Toshishige Yamada	1	10	1	1
129	Eli Rotenberg	1	10	4	4
129	María Teresa Cuberes	1	10	1	2
129	James Tobin	2	12	2	2
129	Gary J Mankey	2	16	2	2
134	David E Aspnes	2	16	2	4
134	Hal Edwards	1	9	1	1
134	David D Nolte	1	9	3	5
134	Mario Dagenais	2	15	2	3
134	Massimiliano Labardi	3	21	1	1
139	John F Currie	2	10	2	3
139	Andrzej A Wawro	1	8	3	6
139	Igor S Nefedov	1	8	1	1
139	Sankar Das Sarma	1	8	5	5
139	Noritaka Usami	1	8	2	3
139	Evangelos Gogolides	1	8	1	4
139	Paul Chu	1	8	2	6
139	Siegfried Selberherr	1	8	2	3
139	Rachel Goldman	1	8	1	4
148	Xavier Bouju	1	7	1	2
148	Ricardo Garcia	1	7	2	5
148	Alain Dereux	1	7	2	6
148	David A Ritchie	1	7	9	8
148	Yuji Matsumoto	1	7	3	4
148	Antonio Serra	1	7	2	6
154	Marius Grundmann	1	6	5	9
154	Frank O Schumann	1	6	1	3
154	Steven H Overbury	1	6	1	1
154	Pascal Brault	1	6	1	3
154	Chih-Kang Shih	1	6	2	3
154	Alberta Bonanni	1	6	1	2
160	Takeshi Egami	1	5	4	6
160	Mats A Göthelid	1	5	2	4
160	Wolfgang Fritzsche	2	10	1	2
160	Patrick J Fay	1	5	4	6
160	于佳	1	5	1	1
160	Hartmut G Roskos	2	10	3	9
166	Pupa U P A Gilbert	1	4	1	3
166	Takayuki Uchihashi	1	4	2	4
166	Luiz Cury	1	4	1	1
166	Yasuhito Gotoh	1	4	1	1
166	Jamie D Phillips	1	4	2	3
171	David Joseph Singh	1	3	1	3
171	Futoshi Iwata	1	3	1	1
171	David Cumming	1	3	1	2
171	Ziqiang Qiu	1	3	2	4
171	Helmut Ermert	1	3	2	5
171	Z Q Qiu	1	3	2	4
177	Wolf-Dieter Schneider	1	2	1	8
177	Sam Fong-Yau Li	1	2	3	6
177	En Tang Kang	1	2	3	11
180	Evgenia Valcheva	1	1	1	1
180	Douglas J Paul	1	1	1	2
180	Yoshishige Suzuki	1	1	3	8
180	Mark E Law	1	1	1	1
180	Yordan M Georgiev	1	1	1	3
180	Giancarlo Salviati	1	1	2	9
180	Jie Liu	1	1	1	2
187	Александр Балмашнов	1	0	1	0
187	Joe C Campbell	1	0	2	2
187	Alan C Seabaugh	1	0	2	4
187	Keh-Yung Cheng	1	0	2	2
187	Xu Jianbin	1	0	1	4

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Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena

Top Authors (by article citations)