Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena

1.6(top 20%)

impact factor

12.2K(top 2%)

papers

244.4K(top 2%)

citations

143(top 5%)

h-index

1.6(top 50%)

extended IF

12.2K

all documents

252.7K

doc citations

229(top 5%)

g-index

Top Authors (by article citations)

#	Author	Articles	Citations	R ARank	R CRank
1	Bharat Bhushan	1	437	4	2
1	Bharat Bhushan	1	437	5	2
3	Wei Wu	2	275	1	1
3	Stephen Y Chou	3	357	2	1
5	Hideki Hasegawa	3	420	1	1
6	Kevin L Jensen	2	178	1	1
7	Yordan M Georgiev	2	142	1	1
8	Ralf B Wehrspohn	1	126	6	6
8	Kornelius Nielsch	1	126	1	2
10	Randall Feenstra	3	157	1	2
11	Takayuki Hoshino	1	119	1	1
11	Masahiko Ishida	1	119	1	1
13	Stephen J Pearton	5	165	6	6
13	Evangelos Gogolides	5	227	1	1
15	Wim M Arnoldbik	1	99	1	1
15	Mauritius C M Van De Sanden	2	126	3	3
15	W M M Erwin Kessels	1	99	4	3
18	Robert M Wallace	1	96	1	2
19	Paul Berger	1	80	2	1
20	Yang-Kyu Choi	1	70	2	3
20	Zhi Liu	2	106	1	1
22	Max C Lemme	2	77	1	1
23	Andreas Fissel	1	65	1	2
24	Akinori Saeki	1	62	1	1
25	Oliver Brandt	1	60	5	3
26	Gyu Chul Yi	1	59	3	3
26	Guillaume Micouin	1	59	1	1
28	Kenji Yamazaki	2	66	2	2
29	Ana I Teixeira	1	57	1	2
29	Steven Brueck	1	57	1	3
29	Paul F Nealey	1	57	1	2
29	Christopher J Murphy	1	57	1	4
34	Kyohei Okubo	1	51	1	1
34	Shin-Ichi Kanemaru	6	115	1	1
34	Masayoshi Nagao	5	88	1	1
34	Takanori Ichiki	1	51	2	2
34	Takashi Matsukawa	4	74	1	1
39	Ralf K Heilmann	3	90	1	1
39	Chulmin Joo	1	48	1	1
39	Chih-Hao Chang	2	86	1	1
42	Shigefusa Chichibu	1	47	6	3
42	Hajime Okumura	1	47	5	3
42	Yuuki Ishida	1	47	2	2
42	steven Denbaars	1	47	7	6
42	Julia W P Hsu	1	47	4	2
42	Steven George	1	47	2	7
42	Babu R Chalamala	2	57	1	1
42	L J Brillson	1	47	2	2
50	Arun Persaud	1	45	1	2
51	Mikhail Baklanov	1	42	2	4
52	Ai Qun Liu	1	41	2	3
53	Seiji Samukawa	2	59	2	1
54	Rebecca Cheung	2	49	1	4
54	Srinivasan Anand	1	37	2	2
56	Shojiro Miyake	1	35	1	1
57	José María Kenny	1	34	11	14
57	Luca Lozzi	1	34	8	9
59	Alois Lugstein	1	33	4	4
59	Feng Zhang	1	33	1	1
59	Stella Pang	3	66	1	2
59	Emmerich Bertagnolli	1	33	3	2
63	Young-Ho Kim	1	32	1	1
64	J E Rowe	1	31	1	1
65	Paul S Weiss	1	30	1	5
65	Ketul C Popat	1	30	1	1
65	Hirofumi Tanaka	1	30	1	1
65	Christian Mitterer	1	30	4	6
69	David Eon	1	29	1	1
69	Christophe Cardinaud	1	29	1	1
71	Valeriu Filip	4	52	1	1
71	Toshio Kamiya	1	27	4	8
71	Toshio Kamiya	1	27	8	10
71	Xu Jianbin	1	27	2	3
71	Vladimir A Gritsenko	1	27	1	2
71	Jun-Young Park	1	27	1	1
71	Hei Wong	1	27	2	5
78	Zexiang Shen	1	26	3	6
78	Tetsuya Suemitsu	1	26	1	1
78	Jun Kameoka	1	26	2	5
78	David A J Moran	2	38	1	1
78	M Holland	1	26	1	1
83	Jun Chen	4	37	1	7
83	J Alexander Liddle	2	28	1	4
83	Xi Hui Liang	1	25	1	1
83	C K Inoki	1	25	1	2
83	Soonil Lee	2	34	1	1
88	Sang Ho Oh	1	24	1	2
88	Takashi Ikuno	1	24	4	3
88	Jae-Min Myoung	2	32	1	1
91	I-Nan Lin	5	42	1	2
91	Jeffry A Kelber	1	23	2	2
91	Heh-Nan Lin	2	36	1	1
91	Hideki Sato	1	23	1	1
95	Ki Tae Nam	1	22	1	1
95	Ioannis Kymissis	1	22	1	2
95	soo-hyun Kim	1	22	1	2
95	Günter Müller	1	22	1	1
95	Gary H Bernstein	2	26	1	4
100	Gregory N Parsons	1	21	1	4
100	Phan Ngoc Minh	1	21	1	1
100	Brian Bennett	1	21	1	2
100	Philippe Renaud	1	21	1	2
104	Andy Thomas	1	20	2	2
104	Jiyoul Lee	1	20	2	2
104	Matteo Ferroni	1	20	2	4
104	Hubert Brueckl	1	20	3	2
104	D Greg Walker	1	20	1	2
104	Seongil Im	1	20	2	2
104	Timothy S. Fisher	3	51	1	2
104	Elisabetta Comini	1	20	2	2
104	Alberto Vomiero	1	20	1	3
104	William R Harrell	1	20	1	1
114	Alexander Y Polyakov	1	19	3	4
114	Wensyang Hsu	1	19	2	3
114	Ataç İmamoğlu	1	19	1	5
114	Andrey S Baturin	2	22	2	2
114	Michael L Simpson	1	19	2	9
114	Nikolai B Smirnov	1	19	4	5
114	Alexander A Puretzky	1	19	1	3
114	David B Geohegan	1	19	1	4
114	Roland Brock	1	19	1	2
114	Gyula Eres	1	19	1	3
114	Lay Kee Ang	1	19	1	2
125	Hansjoerg Scherer	1	18	1	1
125	Alexander B Zorin	1	18	2	3
127	Xinglong Wu	2	33	2	5
127	Paul Chu	3	39	3	5
127	Dietrich R.T. Zahn	1	17	4	10
127	Yoshihiko Hirai	1	17	1	1
127	Alistair C Rowe	1	17	1	3
127	Egbert Oesterschulze	2	20	1	1
127	Yuri A Pashkin	1	17	2	2
127	Paul K Chu	1	17	4	5
135	Suguru Noda	1	16	3	3
136	S Ravi P Silva	4	46	1	4
137	Demetre J Economou	1	14	2	3
137	Qing Ji	1	14	1	2
137	Zhifeng Ren	1	14	3	3
137	Gregory L Snider	1	14	2	6
137	Ooi Kiang Tan	1	14	4	5
137	Michael J Naughton	1	14	2	3
137	Alexei O Orlov	1	14	1	3
137	Alexander N Korotkov	1	14	2	2
137	Kameshwar K Yadavalli	1	14	1	1
146	Jin-Hua Huang	2	16	1	1
146	Pieter Kruit	1	13	1	2
146	Themis Matsoukas	1	13	1	1
146	Cornelis W Hagen	1	13	1	2
146	Tien Khee Ng	1	13	1	2
146	Andrew Wee	1	13	3	8
146	Hisato Yamaguchi	2	23	1	1
146	Richard J Blaikie	1	13	1	2
146	Choi, Hw	1	13	4	7
146	David Cumming	1	13	1	3
146	Wei-Jun Fan	1	13	3	3
146	Takatoshi Yamada	1	13	1	1
158	Panagiotis Argitis	1	12	2	3
158	Maria Vasilopoulou	1	12	1	1
158	Veroniki P Vidali	1	12	1	1
158	Euijoon Yoon	2	14	2	3
158	Eiichi Tamiya	1	12	2	7
158	Jong-Ho Lee	1	12	1	2
158	W G Sloof	1	12	1	2
165	Alexander Zunger	1	11	4	6
165	Katsuhisa Murakami	1	11	1	2
165	Jeong Young Park	1	11	1	1
165	Seong-Ju Park	1	11	2	3
165	Rita Magri	1	11	1	2
165	Sharadha Sambasivan	1	11	1	2
171	Chris Jacobsen	1	10	2	7
171	Jone F Chen	1	10	1	1
171	Shoou Jinn Chang	1	10	4	5
171	Yan-Kuin Su	1	10	1	4
171	Hark Hoe Tan	1	10	4	6
171	Chennupati Jagadish	1	10	6	10
171	Shoou-Jinn Chang	1	10	2	7
178	Whikun Yi	1	9	1	1
178	Jung Ho Je	2	16	1	4
178	David E Aspnes	1	9	1	2
178	Thomas F Kuech	1	9	3	3
178	Ivan G Petrov	1	9	4	10
178	Ignacio Mártil	1	9	3	2
178	Ho Won Jang	1	9	5	6
178	Félix L Martínez	1	9	2	3
178	Haiwon Lee	1	9	1	2
178	Álvaro del Prado	1	9	3	3
178	Jong Kyu Kim	1	9	2	3
178	Charles E Reece	1	9	1	1
178	Enrique S San Andres	1	9	3	3
178	Joel L Plawsky	1	9	2	1
178	Alberta Bonanni	1	9	1	3
178	Jong-Lam Lee	2	11	4	5
178	Jong Min Kim	1	9	1	2
195	Kun-Wei Lin	1	8	2	5
195	Valery Ray	1	8	1	1
197	Orlando Auciello	1	7	4	4
197	Kenneth A Goldberg	3	12	1	3
197	Kristiaan Temst	1	7	1	5
197	Victor Ralchenko	1	7	1	1
197	Si-Chen Lee	1	7	1	3
197	Margriet J Van Bael	1	7	3	6
197	Paul Mirkarimi	1	7	1	1
197	Rachel Goldman	1	7	1	1
197	Sang Youn Han	1	7	2	2
197	Yoshitaka Nakano	1	7	2	2
207	Vivek M Prabhu	1	6	1	1
207	Edward T Yu	1	6	2	3
207	Roland Wiesendanger	1	6	8	10
207	Roland Teissier	1	6	1	3
207	Gary W Rubloff	1	6	2	2
207	Gerald T Fraser	1	6	2	3
207	Eli Rotenberg	1	6	3	5
207	Jacek Marczewski	1	6	1	3
207	Kazuhiro Ohkawa	1	6	2	2
207	Tanemasa Asano	1	6	3	3
207	A N Baranov	1	6	1	1
207	Thomas Kailath	1	6	1	1
207	Wen-Li Wu	1	6	2	8
207	P Soukiassian	1	6	1	2
207	Eric K Lin	1	6	2	3
222	Jian Chen	2	5	1	2
222	S Joe Qin	1	5	2	7
222	Carla Andreani	1	5	1	5
222	Maria C Salvadori	1	5	2	3
222	xixiang Zhang	1	5	4	9
222	Luca Businaro	1	5	4	6
222	Massimo De Vittorio	1	5	2	5
222	Lars Samuelson	1	5	4	6
222	Clifford L Henderson	2	10	1	3
231	Irena Knezevic	1	4	1	2
231	David Ferry	3	6	1	5
231	Changshun Wang	1	4	1	2
231	Jonathan Bird	1	4	4	8
231	Cheng-Liang Huang	1	4	2	8
231	Sushil Kumar	1	4	1	5
231	Volodimir G Litovchenko	1	4	1	1
231	Marya Lieberman	1	4	2	5
239	Hiroshi Hiroshima	1	3	2	2
239	Jorge Hernando	1	3	1	1
239	Yasuhito Gotoh	1	3	2	3
239	Yuichi Kurashima	1	3	2	2
239	Byung-Gook Park	1	3	2	2
239	Kathy Lüdge	2	5	1	1
239	Woo Young Choi	1	3	1	3
239	Jose Manuel G Tijero	1	3	1	3
239	Randall A Laviolette	1	3	2	5
239	Meishoku Masahara	1	3	2	4
239	Chris J Palmstrøm	1	3	1	4
239	Eric Gullikson	1	3	1	2
251	Wolfgang H Krautschneider	1	2	1	1
251	Yashowanta Mohapatra	1	2	2	2
251	Chan Woo Park	1	2	1	3
251	Paul B Mirkarimi	1	2	1	2
255	Taku T Suzuki	1	1	2	11
255	Frederic Houze	1	1	1	2
255	Marc Cahay	1	1	1	2
255	Alİ Yildiz	1	1	1	1
259	Shirley Chiang	1	0	1	2
259	Sung-Ho Hahm	1	0	2	4
259	Masakazu Ichikawa	1	0	1	2
259	Peter B Lerner	1	0	1	0
259	Yilong Lu	1	0	1	3
259	Vincent LaBella	1	0	1	0
259	Jung-Hee Lee	1	0	2	6
259	Jae-Hoon Lee	1	0	2	3
259	Jung-Ho Lee	1	0	1	0
259	Victor Y Aristov	1	0	1	2
259	David A Ritchie	1	0	5	16
259	Philip D Rack	1	0	3	3
259	Julien Barjon	1	0	2	3
259	Paul M Thibado	1	0	1	2
259	Kanad Mallik	1	0	1	3
259	D H Zhang	1	0	1	2

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Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena

Top Authors (by article citations)