Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena

1.6(top 20%)

impact factor

12.2K(top 2%)

papers

244.4K(top 2%)

citations

143(top 5%)

h-index

1.6(top 50%)

extended IF

12.2K

all documents

252.7K

doc citations

229(top 5%)

g-index

Top Authors (by article citations)

#	Author	Articles	Citations	R ARank	R CRank
1	William Palmer	3	144	1	1
2	Shin-Ichi Kanemaru	2	120	2	1
3	Lourdes G Salamanca-Riba	1	89	3	2
4	Alexei Gruverman	1	81	1	2
4	Oleg Kolosov	1	81	1	2
6	Jongsuck Bae	1	76	1	1
7	Yoshihiro Aiura	1	73	1	2
8	Chris Jacobsen	1	71	2	2
8	Jeffrey T Glass	1	71	4	3
10	Nathan Newman	1	69	1	1
11	Luke Hanley	1	64	1	1
12	Peter W T Yuen	1	60	1	1
13	Mauritius C M Van De Sanden	1	58	3	2
14	Panagiotis Argitis	1	57	1	1
16	Randall Feenstra	2	101	2	3
17	Stephen Y Chou	3	76	2	2
18	Marek Skowronski	1	49	5	5
19	Wataru Mizutani	2	58	2	1
19	Heng-Yong Nie	1	47	1	1
21	Christian Schönenberger	1	46	3	5
21	Tanemasa Asano	1	46	1	1
23	Chris G. Van de Walle	1	42	4	4
24	Gary W Rubloff	2	69	1	1
25	Stephen J Pearton	5	126	4	3
25	Kevin L Jensen	3	64	1	1
25	Yang Lu	1	35	1	1
28	Charles Michael Greenlief	1	34	1	1
28	Yasuo Takahashi	1	34	2	3
30	Christophe Cardinaud	1	32	2	1
31	Antonio C Ting	1	31	1	4
31	Egbert Oesterschulze	1	31	1	1
33	Julio Gomez-Herrero	1	30	1	3
33	Gregory N Parsons	1	30	1	1
33	Uzi Landman	1	30	3	4
33	Javier Méndez	1	30	1	2
33	Jose Ignacio Pascual	1	30	1	2
38	Sven Tougaard	1	29	3	4
39	Norbert Esser	2	50	2	2
40	H Kumar Wickramasinghe	1	27	1	2
40	David Ferry	2	40	1	2
40	Xue-Sen Wang	1	27	2	2
40	William Goddard	1	27	3	2
44	Gerd Bacher	1	25	2	3
44	J Alexander Liddle	4	48	1	1
44	Detlef Hommel	1	25	7	4
47	Hiroshi Hiroshima	1	23	1	1
47	Andrew J Steckl	2	43	2	2
47	Ikuo Suemune	1	23	2	1
50	Hideki Hasegawa	2	41	2	3
51	Lucia Sorba	2	20	3	5
51	Tatsuo Yoshinobu	1	20	1	2
51	Greg Bridges	1	20	1	1
51	Ingo Manke	2	23	1	2
51	Gvido Bratina	1	20	1	1
51	Keh-Yung Cheng	2	23	1	2
57	Yves Chabal	1	19	1	4
57	Thomas E Murphy	1	19	1	1
57	Eray S Aydil	1	19	1	2
57	Hiroshi Okada	1	19	2	2
61	Mikhail Lebedev	1	18	1	1
62	Alan C Seabaugh	1	17	1	2
62	Sergey A Barengolts	1	17	1	1
62	Charles Tu	1	17	2	2
62	Alex L De Lozanne	1	17	1	3
66	Richard M Crooks	1	15	1	1
66	P Soukiassian	1	15	3	3
68	Mark Hagmann	2	18	1	3
68	Mark J Hagmann	1	14	1	3
70	Nuria Barniol	1	13	1	2
70	Anders Gustafsson	1	13	1	6
70	David Eason	2	26	1	1
70	Paolo Bordone	1	13	1	1
70	Francesc Perez-Murano	1	13	1	2
70	Xavier Aymerich	1	13	3	3
70	Gabriel Abadal	1	13	1	2
70	Radhakrishnan K	1	13	6	4
70	Rod W Boswell	1	13	1	2
79	Douglas J Paul	1	11	1	1
79	Henning Sirringhaus	1	11	1	4
79	Lars Hultman	2	19	2	6
79	Stella Pang	4	26	1	4
79	Maximo Lopez-Lopez	2	19	2	2
84	David G Cahill	1	10	1	2
84	Noah Hershkowitz	1	10	1	1
84	Andrew L Rohl	2	15	1	5
84	Donald R Baer	1	10	2	3
88	Lijun Gao	1	9	1	3
88	Laurence Eaves	1	9	4	4
88	Geok Ing Ng	2	13	1	1
88	Steven George	1	9	3	6
88	Seong Ihl Woo	1	9	2	5
93	Thomas P Russell	1	8	4	7
93	Chetan Kantibhai Patel	1	8	1	1
93	Carlton Grant Willson	1	8	1	1
93	R Jürgen Behm	1	8	4	8
93	Michael Kozicki	1	8	1	2
93	Michael S Chapman	1	8	3	5
99	Ivan I Kravchenko	1	7	1	1
100	Johann P Reithmaier	1	6	1	5
100	Jian-Jun He	1	6	1	4
100	Joan R Morante	2	8	5	8
100	Francesca Peiro	2	8	2	2
100	Alfred Forchel	1	6	1	1
100	Thomas G Thundat	1	6	2	7
100	Alberta Bonanni	1	6	3	3
100	Giampaolo Zuccheri	1	6	1	2
108	Igor S Nefedov	1	5	1	1
108	David N Mcilroy	1	5	2	4
108	Peter A Dowben	1	5	1	3
108	Basilio J García	1	5	1	2
112	Sergii V Mamykin	1	4	1	1
113	Antonella Poggi	1	3	1	2
113	Andreas D Wieck	1	3	1	3
113	Renaud Delaunay	1	3	2	3
113	Jacques Albert	1	3	3	6
113	Martin Feldman	1	3	1	1
118	Anastas A Bukharaev	1	2	1	1
118	Karen L Kavanagh	1	2	3	5
118	Mark Blamire	1	2	1	2
118	Carlos Dominguez	1	2	1	6
118	Rachel Goldman	2	3	2	3
118	Helmut Ermert	1	2	1	1
124	Alex Antonelli	1	1	1	2
124	Thomas Kailath	1	1	2	7
126	Hiroshi Fukuda	1	0	1	2
126	Fabio Beltram	1	0	2	5

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Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena

Top Authors (by article citations)