Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena

1.6(top 20%)

impact factor

12.2K(top 2%)

papers

244.4K(top 2%)

citations

143(top 5%)

h-index

1.6(top 50%)

extended IF

12.2K

all documents

252.7K

doc citations

229(top 5%)

g-index

Top Authors (by article citations)

#	Author	Articles	Citations	R ARank	R CRank
1	Jeffrey A Hopwood	1	286	1	1
2	Andre Anders	2	186	2	2
3	Stephen Y Chou	2	155	1	2
4	Alberto Garcia	1	99	1	1
5	E Di Fabrizio	1	77	1	1
6	Silvio Modesti	1	69	2	2
7	Seiji Samukawa	2	64	1	3
8	Ernst Meyer	6	234	1	3
9	Randall Feenstra	1	40	2	5
10	Hiroshi Masuhara	1	38	7	6
10	Gottlieb S Oehrlein	1	38	2	2
12	Roland Wiesendanger	3	57	1	1
13	David Ferry	1	35	1	1
13	Dario Anselmetti	2	46	1	4
15	Kazuhito Hashimoto	2	45	3	6
15	María Teresa Cuberes	2	58	1	1
17	Jonas O Tegenfeldt	1	33	1	1
18	Richard J Colton	1	32	2	4
19	Anders Gustafsson	1	31	2	1
20	Stella Pang	3	59	1	1
21	Manfred Radmacher	1	29	4	7
21	Clivia M Sotomayor Torres	2	39	2	3
21	Massimiliano Labardi	1	29	1	2
21	Marco Salerno	1	29	1	2
25	Li-Xin Chen	1	28	1	1
25	Hiroshi Itoh	3	64	1	3
25	Dan M Goebel	1	28	1	1
28	Jordan C Poler	1	26	1	1
28	Axel Lorke	1	26	1	2
28	Johann P Reithmaier	1	26	1	1
28	Karen L Kavanagh	1	26	3	3
28	Victor Milman	1	26	2	4
28	Brent A Morgan	1	26	1	2
34	Luis F Vazquez	1	25	3	3
34	Philippe Sautet	1	25	2	4
36	Satoru Fujisawa	1	24	1	3
36	Eric Tournié	1	24	1	3
38	Tetsuji Yasuda	2	34	1	4
38	Fernando M Teran Arce	1	23	1	1
38	Victor Y Aristov	1	23	2	4
41	Edmund H Linfield	1	22	4	4
41	David A Ritchie	4	39	4	4
41	Javier Garrido	1	22	1	1
41	Alex L De Lozanne	3	50	1	3
45	Wolf-Dieter Schneider	1	21	2	2
45	Richard Mirin	1	21	2	3
45	Hajime Takano	1	21	1	3
48	Zbig R Wasilewski	1	20	3	5
48	Kevin L Jensen	2	34	1	1
51	Lucia Sorba	1	19	3	4
51	Stephen J Pearton	2	28	8	8
51	Kohei Uosaki	1	19	5	5
51	Paul J Kelly	1	19	1	2
51	Gvido Bratina	1	19	1	3
51	Teiko Seki	1	19	1	1
57	Igor V Shvets	1	18	1	1
57	J Alexander Liddle	3	26	1	2
59	Takahito Inoue	1	17	2	3
59	D Frank F Ogletree	3	38	1	3
59	Chenming Hu	1	17	1	3
62	Agustina Asenjo	1	15	1	1
62	Shangjr Gwo	1	15	1	2
62	Jose Maria Gomez Rodriguez	1	15	1	1
65	Koji Muraki	1	13	2	1
65	Nitin Samarth	1	13	2	4
67	Shirley Chiang	2	17	1	3
67	Yukio Hasegawa	1	12	1	3
69	Ole Hansen	1	11	1	2
69	Wolf Widdra	1	11	2	4
69	K L Wang	1	11	5	4
72	Jabez J Mcclelland	1	10	1	1
72	Robert E Scholten	1	10	1	1
74	Dominique Thierry	1	9	1	3
74	Aleksandr A Ezhov	1	9	1	1
74	Takayuki Uchihashi	1	9	2	3
74	Michael A Lieberman	1	9	1	2
74	Kazuya Masu	1	9	2	2
79	Clive J Roberts	2	16	1	5
79	Philip M Williams	2	16	1	3
79	Xu Jianbin	2	12	2	5
82	Mohamed Henini	1	7	11	9
82	Philippe Allongue	1	7	2	2
82	Carlos R. Cabrera	1	7	1	2
82	Mark J Hagmann	1	7	1	2
86	Samuel Granjeaud	1	6	1	1
86	Sabino Maggi	1	6	1	1
86	Hassan Talaat	1	6	1	1
86	David A B Miller	1	6	1	6
86	Yves Huttel	1	6	1	1
86	Eugenio Monticone	1	6	2	1
86	Elke Scheer	1	6	1	1
93	Brian Bennett	2	6	1	6
93	Jacques Barbet	1	5	1	1
93	S Ashok	1	5	1	1
93	Daniel T Cassidy	1	5	1	2
97	Toshimasa Fujisawa	1	4	1	3
97	Won Jong Yoo	1	4	1	2
97	David E Kotecki	1	4	1	1
97	Josep Nogues	1	4	1	2
97	Alessandro Germak	1	4	1	1
102	Andreas D Wieck	1	3	1	2
102	Gary W Rubloff	1	3	1	3
102	Akira Ishibashi	1	3	2	5
105	George K Celler	1	2	1	1
105	Zheng Gai	1	2	1	1
105	Patrick J Fay	2	2	1	2
105	Mark L Leadbeater	1	2	1	7
105	Lothar Ley	1	2	1	1
105	M Pepper	1	2	5	9
111	Yasumoto Tanaka	1	1	3	7
111	Hiroyuki Yaguchi	1	1	3	5
111	Ryszard Czajka	1	1	1	2
114	Qing-Tai Zhao	1	0	2	4

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Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena

Top Authors (by article citations)