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Journals
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Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena
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top-authors
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most-cited
Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena
1.6
(top 20%)
impact factor
12.2K
(top 2%)
papers
244.4K
(top 2%)
citations
143
(top 5%)
h
-index
1.6
(top 50%)
extended IF
12.2K
all documents
252.7K
doc citations
229
(top 5%)
g
-index
Top Authors (by article citations)
#
Author
Articles
Citations
R ARank
R CRank
1
Fernando A. Ponce
1
149
1
1
2
David McKenzie
1
135
2
2
3
Steven Brueck
1
100
2
1
5
Shane Johnson
1
75
1
1
6
Stephen J Pearton
5
129
5
4
7
Tetsuji Yasuda
2
108
2
1
8
Stephen Y Chou
2
99
1
1
9
Masayoshi Nagao
1
49
1
1
10
Eray S Aydil
1
41
3
3
11
Leonidas E Ocola
1
37
1
1
12
Kevin L Jensen
1
35
1
2
13
Adele Sassella
1
32
2
2
14
Mikhail Lebedev
1
29
1
1
15
Randall Feenstra
1
26
3
4
15
Michael S Shur
1
26
3
6
17
Axel Lorke
1
22
1
1
17
Shangjr Gwo
1
22
1
3
17
R Jürgen Behm
1
22
2
5
17
E Di Fabrizio
1
22
1
1
21
George K Celler
2
26
1
2
22
David D Nolte
1
19
2
2
23
Xue-Sen Wang
2
21
2
2
23
Y C Kao
1
18
1
2
25
D Scott Katzer
1
17
1
1
27
Nuria Barniol
1
15
1
1
27
Eli Rotenberg
1
15
1
3
27
Marjorie A Olmstead
1
15
1
3
30
Clivia M Sotomayor Torres
1
14
4
4
31
Steven J Koester
1
13
1
2
31
Lucia Sorba
1
13
4
5
31
Gvido Bratina
1
13
3
5
31
María Teresa Cuberes
1
13
1
2
35
Stella Pang
1
12
3
3
35
Norbert Esser
1
12
1
2
37
Zhongfan Liu
1
11
1
1
37
Yves Huttel
1
11
2
4
39
Harry A Atwater
1
9
3
5
39
D Andrew Evans
1
9
1
3
39
Chee Wee Liu
1
9
2
2
42
Albert Chin
1
7
1
3
42
Herve P Toulhoat
1
7
1
1
42
Francesco La Via
1
7
3
3
42
Stephen Donnelly
1
7
1
1
46
Richard E Palmer
1
6
3
6
46
Edward T Yu
1
6
1
2
46
Kevin D John
1
6
1
2
46
Paul K Chu
1
6
1
1
50
John F Currie
1
5
1
1
50
Shunji Goto
1
5
1
2
52
Edmund H Linfield
2
6
2
4
52
Mohamed Henini
1
4
5
7
52
Peter Beton
1
4
2
4
52
Paul Crozat
1
4
2
2
52
Eric Tournié
1
4
3
7
52
David A Ritchie
1
4
8
13
58
Michael L Myrick
1
3
1
4
58
Vladimir A Krupenin
1
3
1
1
60
Bruce D Terris
1
2
1
1
61
Eduard Belas
1
1
2
3
61
Spencer J Sherwin
1
1
1
1
61
Roman Grill
1
1
1
4
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