Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena

1.6(top 20%)

impact factor

12.2K(top 2%)

papers

244.4K(top 2%)

citations

143(top 5%)

h-index

1.6(top 50%)

extended IF

12.2K

all documents

252.7K

doc citations

229(top 5%)

g-index

Top Authors (by articles)

#	Author	Articles	Citations	R ARank	R CRank
1	J Alexander Liddle	6	44	1	1
2	Stella Pang	4	140	1	1
2	Babu R Chalamala	4	108	1	2
4	Robert M Wallace	3	84	2	2
4	Douglas J Paul	3	40	1	2
4	François Rochet	3	23	1	2
4	Yoon-Ho Song	3	34	1	1
4	Friedrich Schäffler	3	38	1	3
4	Dietrich R.T. Zahn	3	52	1	1
4	Uwe Rossow	3	31	1	2
4	Galia Pozina	3	10	1	3
4	Derrick C Mancini	3	42	1	1
4	Tanemasa Asano	3	12	2	3
4	Stephen Y Chou	3	555	1	1
15	Kenji Yamazaki	2	361	1	1
15	Irina A Buyanova	2	7	2	4
15	Toyoaki Eguchi	2	10	1	3
15	Kevin L Jensen	2	57	1	1
15	Jun Nakamura	2	10	1	4
15	George M Whitesides	2	164	5	10
15	Edward T Yu	2	14	2	3
15	David E Aspnes	2	29	1	2
15	Noritaka Usami	2	3	2	6
15	Hal Edwards	2	20	1	3
15	Jeong In Han	2	26	1	3
15	Nobuyuki N Matsuzawa	2	51	2	1
15	Masayoshi Nagao	2	33	1	1
15	Maurizio De Crescenzi	2	22	2	2
15	Joan R Morante	2	50	2	3
15	Francisco Gamiz	2	1	3	4
15	Charles Tu	2	35	2	2
15	Weimin M Chen	2	7	2	5
15	Gottlieb S Oehrlein	2	50	2	4
15	Francesco La Via	2	38	1	1
15	Zlatko Sitar	2	21	2	2
15	David J Smith	2	11	4	8
15	Keh-Yung Cheng	2	14	2	3
15	Xu Jianbin	2	8	1	5
15	Juan Bautista Roldan Aranda	2	1	2	4
40	Valeri V Afanas'ev	1	47	5	7
40	Dong Qin	1	43	1	5
40	Daniel K Schwartz	1	42	2	3
40	Hyung-Ho Park	1	9	4	6
40	Tetsuji Yasuda	1	14	4	7
40	Jonathan Pelz	1	9	1	2
40	Hisato Ogiso	1	4	1	3
40	Lucia Sorba	1	1	6	8
40	Wei Wu	1	183	1	1
40	Won-Jun Lee	1	34	1	2
40	Stephen J Pearton	1	10	9	10
40	Agustina Asenjo	1	10	1	1
40	Randall Feenstra	1	228	3	2
40	Lewis Johnson	1	19	1	1
40	John Conley	1	314	1	1
40	Anthony Peaker	1	10	1	3
40	Stephen Buckman	1	23	2	2
40	Jörg Schmiedmayer	1	9	1	3
40	Frederic Houze	1	2	1	4
40	Marc Cahay	1	7	3	3
40	B J Hickey	1	5	1	1
40	Andre Stesmans	1	47	2	4
40	Hans Sigg	1	3	1	2
40	Fausto Sirotti	1	17	2	3
40	Steven Brueck	1	21	1	2
40	Gregory L Snider	1	36	2	2
40	André Vantomme	1	7	4	7
40	Shigefusa Chichibu	1	227	1	2
40	Odette Chaix	1	10	2	4
40	Valeriu Filip	1	8	1	3
40	Christian A Zorman	1	25	2	4
40	Andreas D Wieck	1	21	1	1
40	Hongxing Jiang	1	12	3	3
40	Kenneth A Goldberg	1	5	1	2
40	Clivia M Sotomayor Torres	1	153	1	1
40	Craig S Lent	1	36	2	2
40	Gregory N Parsons	1	13	3	3
40	Martin Stutzmann	1	62	7	8
40	Massimo Piotto	1	3	1	1
40	Steven J Eppell	1	12	1	1
40	Vaclav Holy	1	25	2	2
40	Sankar Das Sarma	1	5	4	4
40	Byoungho Lee	1	3	1	7
40	Shin-Ichi Kanemaru	1	13	2	2
40	Owen T Carmichael	1	1	1	1
40	Astushi Takahara	1	23	3	5
40	Elena Cianci	1	3	1	2
40	Seunghwan Lee	1	4	1	3
40	Yasuhiko Takeda	1	7	1	2
40	James Downes	1	15	1	2
40	Beatrice Bonanni	1	1	1	3
40	Omar Teschke	1	6	1	2
40	Marc Heyns	1	24	1	1
40	Sung-Ho Hahm	1	36	1	1
40	Leo Miglio	1	35	1	1
40	Andrew J Steckl	1	44	3	2
40	Shizuka S Nakano	1	4	1	1
40	Johann P Reithmaier	1	15	3	5
40	Philipp Ebert	1	34	2	2
40	Kikuo Makita	1	14	2	2
40	Fredy R Zypman	1	12	1	1
40	Kenneth G H Baldwin	1	23	1	3
40	Marek Skowronski	1	228	5	2
40	Gerhard Hobler	1	5	1	2
40	Brian Bennett	1	19	3	5
40	Enrico Napolitani	1	1	1	4
40	Yasuyuki Miyamoto	1	5	1	2
40	Lars Hultman	1	17	3	6
40	John Haig H Marsh	1	4	6	9
40	Peter B Lerner	1	63	1	1
40	Maurizio Sacchi	1	5	2	4
40	Peter Sutter	1	18	1	3
40	Carla Bittencourt	1	9	1	1
40	Hajime Okumura	1	8	6	8
40	Akihiro Ohtake	1	14	2	4
40	Beng Kang Tay	1	23	3	5
40	Christopher K Ober	1	4	5	5
40	Takanori Ichiki	1	21	2	3
40	Alessandra Alberti	1	24	1	1
40	P Chris Hammel	1	14	2	5
40	Philippe Boucaud	1	1	3	7
40	Toshiyuki Yoshida	1	9	1	1
40	Fabio Iacona	1	14	1	1
40	D Andrew Evans	1	2	2	4
40	Efthimios Kaxiras	1	23	4	8
40	Jung-Hee Lee	1	36	1	1
40	Jueinai Kwo	1	32	1	2
40	Richard A Register	1	132	2	2
40	Paul Chu	1	20	3	5
40	Valeriy Sukharev	1	88	1	1
40	Hubert Brueckl	1	17	1	1
40	Stan Veprek	1	116	2	2
40	Ole Hansen	1	33	1	1
40	Martin Feldman	1	0	1	0
40	Massimo Longo	1	16	1	1
40	steven Denbaars	1	38	5	8
40	Basilio J García	1	6	1	1
40	Stefano Salvatori	1	18	2	2
40	Chee Won Chung	1	47	1	1
40	Mílo D Koretsky	1	0	1	0
40	Joseph H Thywissen	1	14	1	4
40	Giuseppina Padeletti	1	5	1	3
40	Gianni Barucca	1	9	1	2
40	Xiaopeng Shi	1	23	1	2
40	Joerg Neugebauer	1	228	3	2
40	Hongbin Yu	1	12	1	1
40	Manuel Ignacio Marques	1	10	1	1
40	Sergey Rumyantsev	1	21	2	3
40	Fernanda C Stedile	1	17	1	3
40	Seong-Ju Park	1	41	1	1
40	Kevin E Smith	1	15	1	2
40	Patrik Schmuki	1	3	3	6
40	Michael S Silverstein	1	10	1	1
40	Lee J Richter	1	17	1	2
40	Oliver Brandt	1	33	6	6
40	Olivier J F Martin	1	31	1	3
40	Mikhail Baklanov	1	9	3	3
40	Christophe Cardinaud	1	13	1	3
40	Vincent L Bouchiat	1	47	1	2
40	Giancarlo Salviati	1	1	2	6
40	David A Ritchie	1	4	10	10
40	Anja Mz Boisen	1	33	1	1
40	Castro-Cal, Jf	1	16	1	2
40	Mehran Mehregany	1	25	3	5
40	Shunji Goto	1	11	2	4
40	Sven Achenbach	1	45	1	1
40	Tatiana Shubina	1	4	6	7
40	Gustavo A M Sáfar	1	1	1	2
40	Isabelle Berbezier	1	25	2	2
40	Tae-Youl Ha	1	5	1	1
40	Kuei-Shu Chang-Liao	1	0	1	2
40	Masaaki A Tanaka	1	75	1	1
40	P R Muret	1	12	1	1
40	Jingyu Lin	1	12	2	3
40	Matthias Schreck	1	20	2	3
40	Martin Albrecht	1	116	3	2
40	Annamaria Gerardino	1	15	1	1
40	Stefan Heun	1	1	2	4
40	Ángel Rubio Secades	1	70	3	2
40	Paolo Bruschi	1	3	1	1
40	Patrick W Leech	1	3	1	2
40	Younan Xia	1	43	2	4
40	Alexei O Orlov	1	36	2	2
40	Jamie D Phillips	1	11	2	2
40	Yasuo Takahashi	1	248	2	1
40	Alex L De Lozanne	1	12	1	2
40	Miroslav Micovic	1	6	1	2
40	Luciana Di Gaspare	1	3	1	3
40	Il Yong Kim	1	1	1	1
40	L J Brillson	1	5	2	2
40	Maria Cristina Dos Santos	1	6	3	3
40	Toyohiro Chikyow	1	11	1	1
40	David A Muller	1	21	2	3
40	C Barry Carter	1	3	5	8
40	Ferenc Riesz	1	16	1	1
40	Alberta Bonanni	1	1	3	5
40	Jong-Lam Lee	1	2	2	3
40	Barry C Arkles	1	10	1	1
40	Roberto Gunnella	1	5	4	5
40	John S Petersen	1	5	1	1
40	Arthur R Smith	1	15	1	2
40	Srinivasan Anand	1	19	1	3
40	Emanuele Rimini	1	14	2	3
40	Ju-Jin Kim	1	11	1	1
40	Jennie Si	1	6	2	2
40	Shuji Nakamura	1	227	1	1
40	Christophe Coupeau	1	36	1	1
40	R Ramesh	1	45	6	9
40	Hideki Hasegawa	1	14	3	3
40	David Attwood	1	5	1	1
40	Tsuyoshi Moriya	1	31	1	2
40	Eric Gullikson	1	19	1	1
40	Joseph Nordgren	1	15	1	3
40	Richard A Soref	1	7	1	2
40	J D Gillaspy	1	37	1	2
40	M Pepper	1	9	6	7
40	Gary H Bernstein	1	36	2	2

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Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena

Top Authors (by articles)