Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena

1.6(top 20%)

impact factor

12.2K(top 2%)

papers

244.4K(top 2%)

citations

143(top 5%)

h-index

1.6(top 50%)

extended IF

12.2K

all documents

252.7K

doc citations

229(top 5%)

g-index

Top Authors (by articles)

#	Author	Articles	Citations	R ARank	R CRank
1	Stella Pang	6	56	1	1
2	Yukio Hasegawa	5	98	1	2
3	J Alexander Liddle	4	31	1	3
4	Tetsuji Yasuda	3	47	2	3
4	Stephen J Pearton	3	36	7	10
4	Tadatomo T Suga	3	82	1	1
4	Akihiro Ohtake	3	47	1	1
4	Uwe Rossow	3	58	1	1
4	Vincent Ch Lee	3	82	1	1
4	Stephen Y Chou	3	1,093	2	1
11	Cees Dekker	2	133	2	3
11	Hiroshi Hiroshima	2	21	1	3
11	Hongxing Jiang	2	35	2	3
11	David E Aspnes	2	50	2	2
11	Takayuki Uchihashi	2	43	1	2
11	Roland Wiesendanger	2	30	3	6
11	Joan R Morante	2	26	7	5
11	Ole Hansen	2	26	1	1
11	David A Ritchie	2	19	6	6
11	Javier Jiménez-Leube	2	7	1	1
11	Jingyu Lin	2	35	2	3
11	Mark J Hagmann	2	41	1	1
11	Hideki Hasegawa	2	88	2	1
24	Yuzuru Takamura	1	19	1	1
24	Kyu Chang Park	1	10	1	3
24	Masayuki Abe	1	9	1	1
24	Jabez J Mcclelland	1	50	1	2
24	Zoltán L Horváth	1	78	1	1
24	Lucia Sorba	1	10	3	3
24	Hongqi Xu	1	0	2	3
24	Suresh Valiyaveettil	1	21	1	3
24	Panagiotis Argitis	1	3	1	2
24	Randall Feenstra	1	19	1	2
24	Toshishige Yamada	1	8	1	2
24	Matthias Bode	1	17	2	4
24	Liming Dai	1	4	2	5
24	Thorsten Hesjedal	1	4	1	4
24	Gerd Bacher	1	5	3	7
24	Chris Jacobsen	1	119	1	2
24	Gregory L Snider	1	10	1	3
24	Antonella Poggi	1	8	1	2
24	Thirumalai Venkatesan	1	2	6	12
24	Edward T Yu	1	10	3	6
24	Kenneth A Goldberg	1	39	1	1
24	Bruce E Koel	1	53	3	3
24	Gregory N Parsons	1	18	3	3
24	Mikhail Lebedev	1	2	2	5
24	Mattias Beck	1	9	1	1
24	Steven J Eppell	1	10	1	2
24	Sankar Das Sarma	1	30	4	4
24	Luiz Cury	1	4	1	2
24	Yves Caudano	1	298	1	1
24	Steven De Feyter	1	21	3	5
24	Alain Cappy	1	2	2	2
24	Evangelos Gogolides	1	30	1	1
24	Gary W Rubloff	1	18	2	1
24	Fredy R Zypman	1	10	1	1
24	Sam Fong-Yau Li	1	16	2	5
24	Satoru Fujisawa	1	15	1	1
24	Peter B Lerner	1	48	1	1
24	Gilles Patriarche	1	4	2	7
24	Ilana Bar	1	32	2	3
24	Michael H Hecht	1	2	1	6
24	Jonder Morais	1	1	2	5
24	Hiroshi Masuhara	1	28	6	9
24	Ivan Kostic ̌	1	6	1	1
24	Jeffrey Bokor	1	17	3	3
24	Alexey Bezryadin	1	123	1	2
24	Roya Maboudian	1	787	2	1
24	Katsuhiko Higuchi	1	3	1	1
24	Alexander M Mintairov	1	2	1	1
24	Juraj Darmo	1	1	1	4
24	Paul Chu	1	14	3	7
24	Olga E Glukhova	1	35	1	2
24	Francesca Peiro	1	9	3	2
24	Ken Okano	1	22	1	1
24	Fabio Beltram	1	15	2	1
24	Ciro Cecconi	1	15	1	1
24	Michael Rieth	1	3	1	2
24	Yves Chabal	1	298	1	1
24	Karsten Hinrichs	1	8	1	2
24	steven Denbaars	1	11	9	13
24	Michael L Myrick	1	5	1	3
24	Joseph H Thywissen	1	34	1	1
24	Konstantinos P Giapis	1	14	4	5
24	Nikolai B Zhitenev	1	34	2	2
24	R Jürgen Behm	1	21	7	8
24	Jin Jang	1	10	3	3
24	Wataru Mizutani	1	6	3	5
24	Manuel Ignacio Marques	1	4	1	3
24	Kwang-Ryeol Lee	1	20	2	2
24	Dietrich R.T. Zahn	1	7	6	7
24	Jose Javier Serrano Olmedo	1	1	1	2
24	Bruce W Wessels	1	29	3	2
24	Patrik Schmuki	1	6	2	4
24	Omer Nur	1	16	1	1
24	Christophe Cardinaud	1	24	2	4
24	Jerry Bernholc	1	9	2	6
24	Keh-Yung Cheng	1	8	1	1
24	Shunji Goto	1	16	1	1
24	Giacomo Torzo	1	22	1	1
24	Xu Jianbin	1	15	4	2
24	Dongxia Shi	1	1	1	2
24	Marco Buongiorno Nardelli	1	9	2	4
24	Nicola Lisi	1	7	3	5
24	Patrick J Fay	1	1	3	6
24	Kin M Yu	1	6	2	4
24	Steven L Rolston	1	50	2	2
24	Bruce D Terris	1	2	1	2
24	Ivan Maximov	1	2	1	3
24	Mark Hagmann	1	20	1	2
24	Hideki Fujiwara	1	28	1	2
24	Stefan Heun	1	10	1	3
24	Ioannis G Karafyllidis	1	14	1	4
24	Keiji Sasaki	1	28	2	5
24	Satoshi Haraichi	1	7	1	1
24	Alexei O Orlov	1	10	1	2
24	Gyula Eres	1	1	1	1
24	Hans M Hertz	1	8	1	2
24	Takatoshi Yamada	1	22	1	2
24	Mineharu Suzuki	1	34	1	2
24	Tilman Pfau	1	23	3	8
24	Detlef Hommel	1	5	7	7
24	Walter Arnold	1	51	1	4
24	Peng Zhang	1	3	2	3
24	Karthik Ramakrishnan Vaidyanathan	1	16	1	1
24	Robert J Hamers	1	76	2	3
24	Jan Kuzmik	1	1	1	1
24	Martin Kristensen	1	7	1	1
24	John Bowers	1	18	3	4
24	Rachel Goldman	1	19	1	1
24	Leonidas E Ocola	1	7	1	1
24	Ray Ashoori	1	34	2	2
24	Hiroyuki Tanaka	1	59	1	1
24	Hadis Morkoç	1	4	2	4
24	D G Hasko	1	11	2	4
24	N Goldsman	1	0	1	2
24	A Majumdar	1	133	2	4
24	J D Gillaspy	1	50	3	4
24	A Bezryadin	1	123	1	2
24	M Pepper	1	13	5	6
24	Gary H Bernstein	1	10	1	2

Scientometrics

Overviews

Citing Bodies

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena

Top Authors (by articles)