Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena

1.6(top 20%)

impact factor

12.2K(top 2%)

papers

244.4K(top 2%)

citations

143(top 5%)

h-index

1.6(top 50%)

extended IF

12.2K

all documents

252.7K

doc citations

229(top 5%)

g-index

Top Authors (by articles)

#	Author	Articles	Citations	R ARank	R CRank
1	Ernst Meyer	6	234	1	3
2	David A Ritchie	4	39	4	4
3	Roland Wiesendanger	3	57	1	1
3	J Alexander Liddle	3	26	1	2
3	Stella Pang	3	59	1	1
3	D Frank F Ogletree	3	38	1	3
3	Alex L De Lozanne	3	50	1	3
3	Hiroshi Itoh	3	64	1	3
9	Tetsuji Yasuda	2	34	1	4
9	Stephen J Pearton	2	28	8	8
9	Kevin L Jensen	2	34	1	1
9	Shirley Chiang	2	17	1	3
9	Clive J Roberts	2	16	1	5
9	Clivia M Sotomayor Torres	2	39	2	3
9	Philip M Williams	2	16	1	3
9	Brian Bennett	2	6	1	6
9	Andre Anders	2	186	2	2
9	Kazuhito Hashimoto	2	45	3	6
9	Dario Anselmetti	2	46	1	4
9	María Teresa Cuberes	2	58	1	1
9	Xu Jianbin	2	12	2	5
9	Patrick J Fay	2	2	1	2
9	Seiji Samukawa	2	64	1	3
9	Stephen Y Chou	2	155	1	2
25	Alberto Garcia	1	99	1	1
25	Dominique Thierry	1	9	1	3
25	Jabez J Mcclelland	1	10	1	1
25	Luis F Vazquez	1	25	3	3
25	Aleksandr A Ezhov	1	9	1	1
25	Lucia Sorba	1	19	3	4
25	Yasumoto Tanaka	1	1	3	7
25	Agustina Asenjo	1	15	1	1
25	Edmund H Linfield	1	22	4	4
25	Zbig R Wasilewski	1	20	3	5
25	Randall Feenstra	1	40	2	5
25	Igor V Shvets	1	18	1	1
25	Jordan C Poler	1	26	1	1
25	George K Celler	1	2	1	1
25	Manfred Radmacher	1	29	4	7
25	Kohei Uosaki	1	19	5	5
25	Paul J Kelly	1	19	1	2
25	Samuel Granjeaud	1	6	1	1
25	Anders Gustafsson	1	31	2	1
25	Mohamed Henini	1	7	11	9
25	Philippe Allongue	1	7	2	2
25	Andreas D Wieck	1	3	1	2
25	Wolf-Dieter Schneider	1	21	2	2
25	Gvido Bratina	1	19	1	3
25	Takayuki Uchihashi	1	9	2	3
25	Jeffrey A Hopwood	1	286	1	1
25	Axel Lorke	1	26	1	2
25	Toshimasa Fujisawa	1	4	1	3
25	David Ferry	1	35	1	1
25	Sabino Maggi	1	6	1	1
25	Hassan Talaat	1	6	1	1
25	Gary W Rubloff	1	3	1	3
25	Johann P Reithmaier	1	26	1	1
25	Satoru Fujisawa	1	24	1	3
25	Robert E Scholten	1	10	1	1
25	Qing-Tai Zhao	1	0	2	4
25	Michael A Lieberman	1	9	1	2
25	Shangjr Gwo	1	15	1	2
25	Karen L Kavanagh	1	26	3	3
25	Carlos R. Cabrera	1	7	1	2
25	Takahito Inoue	1	17	2	3
25	David A B Miller	1	6	1	6
25	Yves Huttel	1	6	1	1
25	Jonas O Tegenfeldt	1	33	1	1
25	Won Jong Yoo	1	4	1	2
25	Hiroshi Masuhara	1	38	7	6
25	Eugenio Monticone	1	6	2	1
25	Richard Mirin	1	21	2	3
25	Silvio Modesti	1	69	2	2
25	Ole Hansen	1	11	1	2
25	Zheng Gai	1	2	1	1
25	Fernando M Teran Arce	1	23	1	1
25	Yukio Hasegawa	1	12	1	3
25	Gottlieb S Oehrlein	1	38	2	2
25	David E Kotecki	1	4	1	1
25	Kazuya Masu	1	9	2	2
25	Jose Maria Gomez Rodriguez	1	15	1	1
25	Eric Tournié	1	24	1	3
25	Teiko Seki	1	19	1	1
25	Philippe Sautet	1	25	2	4
25	Jacques Barbet	1	5	1	1
25	Victor Y Aristov	1	23	2	4
25	Li-Xin Chen	1	28	1	1
25	Akira Ishibashi	1	3	2	5
25	Koji Muraki	1	13	2	1
25	Hiroyuki Yaguchi	1	1	3	5
25	Chenming Hu	1	17	1	3
25	Wolf Widdra	1	11	2	4
25	Javier Garrido	1	22	1	1
25	Victor Milman	1	26	2	4
25	Ryszard Czajka	1	1	1	2
25	Nitin Samarth	1	13	2	4
25	S Ashok	1	5	1	1
25	Hajime Takano	1	21	1	3
25	Elke Scheer	1	6	1	1
25	Massimiliano Labardi	1	29	1	2
25	Marco Salerno	1	29	1	2
25	Josep Nogues	1	4	1	2
25	Mark L Leadbeater	1	2	1	7
25	Alessandro Germak	1	4	1	1
25	Lothar Ley	1	2	1	1
25	Richard J Colton	1	32	2	4
25	Mark J Hagmann	1	7	1	2
25	Dan M Goebel	1	28	1	1
25	K L Wang	1	11	5	4
25	Daniel T Cassidy	1	5	1	2
25	M Pepper	1	2	5	9
25	E Di Fabrizio	1	77	1	1
25	Brent A Morgan	1	26	1	2

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Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena

Top Authors (by articles)