Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena

1.6(top 20%)

impact factor

12.2K(top 2%)

papers

244.4K(top 2%)

citations

143(top 5%)

h-index

1.6(top 50%)

extended IF

12.2K

all documents

252.7K

doc citations

229(top 5%)

g-index

Top Authors (by articles)

#	Author	Articles	Citations	R ARank	R CRank
1	H Kumar Wickramasinghe	3	173	1	2
1	Stephen J Pearton	3	74	7	5
1	George K Celler	3	48	1	1
1	Shirley Chiang	3	348	1	2
1	D Frank F Ogletree	3	110	1	1
6	Lucia Sorba	2	37	1	2
6	Marius Grundmann	2	179	2	1
6	Hiroshi Hiroshima	2	18	1	1
6	Edward T Yu	2	51	1	1
6	Roland Wiesendanger	2	62	1	1
6	Andrew J Steckl	2	18	1	1
6	J Alexander Liddle	2	86	1	1
6	Robert F Davis	2	43	1	4
6	Daniel E Bürgler	2	62	1	1
6	Yukio Hasegawa	2	91	1	1
6	R Jürgen Behm	2	97	2	6
6	Gil U Lee	2	13	1	1
6	Gregory Rohrer	2	41	1	1
6	Stephen Giugni	2	10	1	2
6	Jürgen P Rabe	2	96	1	3
6	Alex L De Lozanne	2	42	1	1
22	Hans-Juergen Butt	1	26	2	3
22	Helge Weman	1	9	1	2
22	Alexander Zunger	1	8	4	6
22	Nuria Barniol	1	4	1	1
22	Ernst Meyer	1	48	1	2
22	Alan C Seabaugh	1	7	2	4
22	Zbig R Wasilewski	1	41	4	2
22	Randall Feenstra	1	36	3	4
22	John F Currie	1	18	1	1
22	Mark D Stiles	1	39	1	2
22	Carmen Ocal	1	60	1	1
22	Sidong Lei	1	17	1	1
22	Samuel Granjeaud	1	37	1	1
22	Clive J Roberts	1	12	1	1
22	Yuri L Lyubchenko	1	23	1	1
22	Henning Sirringhaus	1	29	1	4
22	Gvido Bratina	1	30	1	2
22	Imshik Lee	1	15	1	1
22	Yael Nemirovsky	1	66	2	2
22	Sankar Das Sarma	1	5	3	3
22	Yoshihiro Kobayashi	1	33	1	1
22	Peter Guttmann	1	1	1	1
22	Shin-Ichi Kanemaru	1	1	1	2
22	Mats Eriksson	1	32	1	1
22	Jeevak M Parpia	1	4	1	2
22	Yoich Uehara	1	60	1	1
22	Richard L Mccreery	1	3	1	5
22	Raymond Browning	1	29	1	1
22	Juan Jose Saenz	1	147	1	1
22	Uzi Landman	1	134	4	4
22	Lars Hultman	1	21	2	6
22	Paul Dawson	1	9	2	3
22	Carlos J Bustamante	1	18	2	3
22	Vyacheslav V Tsiolko	1	1	1	1
22	John J Boland	1	42	2	4
22	Leigh M Smith	1	31	1	1
22	Stella Pang	1	7	2	1
22	Marino Marsi	1	21	3	2
22	Mark F Bocko	1	9	1	1
22	Franz Giessibl	1	73	1	1
22	Hidenori Kawanishi	1	18	3	2
22	Tobias Reich	1	22	1	1
22	Christian Schönenberger	1	101	1	1
22	Xavier Aymerich	1	4	1	4
22	David A Hammer	1	7	1	1
22	Conrad Becker	1	21	1	1
22	Ricardo Garcia	1	4	2	3
22	Yoji Saito	1	29	1	1
22	Wataru Mizutani	1	15	1	1
22	David Keith	1	23	1	2
22	Dietrich R.T. Zahn	1	43	2	1
22	Kazuhiro Ohkawa	1	14	4	4
22	Gordon G Southam	1	12	1	2
22	Jayr Amorim	1	91	1	1
22	Granozzi Gaetano	1	6	1	3
22	David A Ritchie	1	4	6	8
22	Akira Ishibashi	1	15	1	1
22	Itaru Kamiya	1	53	2	2
22	R Stanley Williams	1	17	2	3
22	Amadeo L Vazquez De Parga	1	39	1	3
22	Shinji Okazaki	1	141	1	1
22	Angelo Antonini	1	30	1	4
22	David Tomanek	1	44	4	4
22	John P Lafemina	1	29	2	2
22	Othmar Marti	1	28	1	1
22	Patrick W Leech	1	8	1	2
22	Ulf Gennser	1	19	1	3
22	María Alonso	1	22	2	1
22	L J Brillson	1	17	1	1
22	Jesus A Del Alamo	1	24	3	4
22	John Bowers	1	6	2	2
22	Ferenc Riesz	1	12	1	3
22	Seiji Samukawa	1	5	2	4
22	Wolfgang M Heckl	1	10	1	2
22	Stephen Y Chou	1	18	1	1
22	K L Wang	1	19	3	4
22	Robert Sherman	1	78	1	1
22	Robert D Allen	1	34	1	1

Scientometrics

Overviews

Citing Bodies

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena

Top Authors (by articles)